Tapered cell profile and fabrication
View Patent ↗Methods, systems, and devices for a tapered cell profile and fabrication are described. A memory storage component may contain multiple chalcogenide materials and may include a tapered profile. For example, a first chalcogenide material may be coupled with a second chalcogenide material. Each of the chalcogenide materials may be further coupled with a conductive material (e.g., an electrode). Through an etching process, the chalcogenide materials may tapered (e.g., step tapered). A pulse may be applied to the tapered chalcogenide materials resulting in a memory storage component that includes a mixture of the chalcogenide materials.
1. A memory device, comprising:
a storage component comprising a mixture of a first chalcogenide material and a second chalcogenide material different from the first chalcogenide material, the storage component having a first surface and a second surface opposite the first surface, the second surface having a greater area than the first surface;
a first electrode coupled with the first surface of the storage component;
a first conductive material coupled with the first electrode;
a second electrode coupled with the second surface of the storage component and in electronic communication with the first electrode via the storage component; and
a third electrode coupled with the second electrode.
2. The memory device of claim 1 , further comprising:
a dielectric material in contact with at least one side of each of the storage component, the first electrode, and the second electrode.
3. The memory device of claim 1 , further comprising:
a liner in contact with at least one side of the storage component, wherein the liner comprises a first portion in contact with the first chalcogenide material and a second portion that is orthogonal to the first portion and in contact with the second chalcogenide material.
4. The memory device of claim 1 , further comprising:
a third chalcogenide material, wherein the storage component comprises a mixture of the first chalcogenide material, the second chalcogenide material, and the third chalcogenide material.
5. The memory device of claim 1 ,
wherein a width of the first conductive material is the same as a width of the first electrode in a first direction and a width of the third electrode is different than a width of the second electrode in the first direction.
6. The memory device of claim 1 , further comprising:
a second deck coupled with a first deck that comprises the storage component, the second deck comprising:
a second storage component comprising a mixture of a plurality of chalcogenide materials, a number of the plurality of chalcogenide materials being different from a number of chalcogenide materials of the storage component.
7. The memory device of claim 1 , further comprising:
a second storage component comprising the first chalcogenide material and the second chalcogenide material, the second storage component having a first surface and a second surface opposite the first surface, the second surface having a greater area than the first surface.
8. A memory device, comprising:
a storage component comprising a first chalcogenide material and a second chalcogenide material different from the first chalcogenide material, the storage component having a first surface and a second surface opposite the first surface in a first direction, the second surface having a greater area than the first surface;
a first electrode coupled with the first surface of the storage component;
a first conductive material coupled with the first electrode;
a second electrode coupled with the second surface of the storage component and in electronic communication with the first electrode via the storage component; and
a third electrode coupled with the second electrode.
9. The memory device of claim 8 , further comprising:
a liner in contact with at least one side of the storage component.
10. The memory device of claim 8 , wherein the storage component further comprises a third chalcogenide material different from the first chalcogenide material and the second chalcogenide material, the third chalcogenide material in contact with at least one side of the second chalcogenide material.
11. The memory device of claim 10 , wherein the second chalcogenide material and the third chalcogenide material comprise a different dimension in at least one direction.
12. The memory device of claim 11 , wherein the first chalcogenide material comprises a different dimension from the second chalcogenide material and the third chalcogenide material in at least one direction.
13. The memory device of claim 8 , wherein a width of the first chalcogenide material is the same as a width of the first electrode, and wherein a width of the second chalcogenide material is the same as a width of the second electrode.
14. The memory device of claim 8 , further comprising:
a second storage component comprising the first chalcogenide material and the second chalcogenide material, the second storage component having a first surface and a second surface opposite the first surface in the first direction, the second surface having a greater area than the first surface.