IP Library Granted Patent US 10,697,827
Granted Patent B2
US 10,697,827 · App. 14/528,847 · Granted Jun 30, 2020

Systems and methods for extending frequency response of resonant transducers

Inventors: Joe VanDeWeert (Maywood, NJ); Adam Hurst (New York, NY); Joseph Carter (League City, TX); Douglas R. Firth (Ithaca, NY); Alan R. Szary (Ithaca, NY)
Assignee: Kulite Semiconductor Products, Inc.
G01H13/00G01H11/08G01L9/065G01L9/0047
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Quick Facts
Patent No.
US 10,697,827
App. No.
14/528,847
Granted
Jun 30, 2020
Kind
B2
Abstract

Certain implementations of the disclosed technology may include systems and methods for extending a frequency response of a transducer. A method is provided that can include receiving a measurement signal from a transducer, wherein the measurement signal includes distortion due to a resonant frequency of the transducer. The method includes applying a complementary filter to the measurement signal to produce a compensated signal, wherein applying the complementary filter reduces the distortion to less than about +/−1 dB for frequencies ranging from about zero to about 60% or greater of the resonant frequency. The method further includes outputting the compensated signal.

Claims (234)

1. A method comprising:

receiving an electrical measurement signal from a sensor having a protective screen, wherein the measurement signal includes distortion due to a resonant frequency of the sensor;

applying, to the measurement signal, an analog complementary compensation filter circuit adapted to compensate for distortion in the measurement signal caused by the protective screen, the complementary compensation filter comprising a second order transfer function to the measurement signal to produce a compensated frequency response signal, wherein applying the complementary compensation filter circuit reduces the distortion to less than 1 dB for frequencies ranging from zero to 60% of the resonant frequency; and

outputting the compensated signal wherein the compensated signal reduces a resonance associated with the sensor.

2. The method of claim 1 , wherein applying the complementary compensation filter circuit to the measurement signal comprises applying a filter having a frequency response based on an inverse frequency response of the sensor, wherein the second order transfer function is implemented by a double integrator with feedback.

3. The method of claim 1 , further comprising;

determining the resonant frequency associated with a frequency response of the sensor.

4. The method of claim 3 , further comprising:

determining a frequency response complementary to the frequency response of the sensor.

5. The method of claim 3 , further comprising:

determining a quality factor associated with a frequency response of the sensor.

6. The method of claim 5 , further comprising:

determining parameters of the compensation filter circuit corresponding to a frequency response and quality factor complementary to the frequency response of the sensor.

7. The method of claim 1 , wherein the complementary compensation filter circuit includes a Helmholtz frequency response, T c (f), represented by the equation:

T

c

(

f

)

=

-

f

2

+

i

f

f

n

Q

+

f

n

2

-

f

2

+

i

f

f

n

+

f

n

2

wherein f is the frequency variable, f n is the resonant frequency of the transducer, and Q is a quality factor associated with the sensor frequency response.

8. The method of claim 1 , wherein the complementary compensation filter circuit includes a seismic mass frequency response, T c (f), represented by the equation:

T

c

(

f

)

=

-

f

2

+

i

f

f

n

Q

+

f

n

2

f

n

2

wherein f is the frequency variable, f n is the resonant frequency of the transducer, and Q is a quality factor associated with the sensor frequency response.

9. The method of claim 1 , wherein the sensor comprises a diaphragm having a resonant frequency modeled by

f

=

36

2

π

E

t

2

12

ρ

a

4

(

1

-

v

2

)

and wherein the diaphragm is flat and square having a length a and thickness t, and where E is Young's modulus, v is Poisson's ratio of the diaphragm material, and p is the applied pressure measured in Pascals.

10. The method of claim 1 , wherein the complementary compensation filter circuit further reduces the distortion to less than 2 dB for frequencies ranging from 60% to 90% of the resonant frequency.

11. The method of claim 1 , wherein the receiving the measurement signal from the sensor comprises receiving a pressure measurement signal.

12. A filter comprising:

a measurement input terminal adapted to receive an electrical measurement signal from a sensor having a protective screen, wherein the measurement signal includes distortion due to a resonant frequency associated with the sensor;

an analog complementary filter compensation circuit adapted to compensate for distortion in the measurement signal caused by the protective screen, the complementary compensation filter comprising a second order transfer function, the circuit adapted to receive and compensate a frequency response of the measurement signal and to reduce the distortion to less than 1 dB for frequencies ranging from zero to 60% of the resonant frequency; and

an output terminal for outputting the compensated measurement signal, wherein the compensated signal reduces a resonance associated with the sensor.

13. The filter of claim 12 , wherein the compensation circuit comprises a double integrator with feedback.

14. The filter of claim 12 , wherein the compensation circuit comprises an anti-resonant frequency corresponding to the resonant frequency of the sensor.

15. The filter of claim 12 , wherein the compensation circuit comprises a quality factor that is about equal to or complementary to a quality factor associated with the sensor.

16. The filter of claim 12 , wherein the compensation circuit comprises a Helmholtz frequency response, T c (f), represented by the equation:

T

c

(

f

)

=

-

f

2

+

i

f

f

n

Q

+

f

n

2

-

f

2

+

i

f

f

n

+

f

n

2

wherein f is the frequency variable, f n is the resonant frequency of the sensor, and Q is a quality factor associated with a frequency response of the sensor.

17. The filter of claim 12 , wherein the compensation circuit comprises a seismic mass frequency response, T c (f), represented by the equation:

T

c

(

f

)

=

-

f

2

+

i

f

f

n

Q

+

f

n

2

f

n

2

wherein f is the frequency variable, f n is the resonant frequency of the sensor, and Q is a quality factor associated with a frequency response of the sensor.

18. The filter of claim 12 , further comprising a sensor, wherein the sensor comprises a diaphragm having a resonant frequency modeled by

f

=

36

2

π

E

t

2

12

ρ

a

4

(

1

-

v

2

)

wherein the diaphragm is flat and square having a length a and thickness t, and where E is Young's modulus, v is Poisson's ratio of the diaphragm material, and p is the applied pressure measured in Pascals.

19. The filter of claim 12 , wherein the compensation circuit is further configured to reduce the distortion to less than 2 dB for frequencies ranging from 60% to 90% of the resonant frequency of the sensor.

20. The filter of claim 12 , wherein the compensation circuit comprises a low-pass filter configured to attenuate measurement signal frequencies or compensated signal frequencies above the resonant frequency.

21. The filter of claim 20 , wherein the low-pass filter comprises a 6 pole filter having a 48 dB/octave roll-off.

22. The filter of claim 12 , wherein the measurement signal comprises a pressure measurement signal.

23. The filter of claim 12 , further comprising a sensor, wherein the sensor comprises an accelerometer.

24. The filter of claim 12 , further comprising a sensor, wherein the sensor includes a diaphragm.

25. The filter of claim 24 wherein the sensor includes one or more piezoresistive elements in communication with the diaphragm.

26. The filter of claim 24 wherein the sensor includes a housing, comprising one or more of a cavity and a mounting substrate.

27. The filter of claim 12 , wherein the compensation circuit is an analog circuit.

28. The filter of claim 12 , wherein the compensation circuit comprises one or more of an amplifier, a summing block, an integrator, and a band-pass filter.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2014
From: HURST, ADAM; VANDEWEERT, JOSEPH R.; CARTER, JOSEPH; FIRTH, DOUGLAS R.; SZARY, ALAN R.
To: KULITE SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 034075/0060 →
Continuity (2)
Provisional Application 62012764 · Jun 16, 2014
Related Publication 20150365072A1 · Dec 17, 2015