Acetylide-based silicon precursors and their use as ALD/CVD precursors
Provided are acetylide-based compounds and methods of making the same. Also provided are methods of using said compounds in film deposition processes to deposit films comprising silicon. Certain methods comprise exposing a substrate surface to a acetylide-based precursor and a reactant in various combinations.
1. A method of depositing a silicon-containing film, the method comprising:
exposing a substrate surface to a silicon precursor and a reactant, the silicon precursor having the general formula SiX 4-n A n where each X is independently a halide, alkyl, amine, hydrogen or combination thereof, A is an acetylide and n is 1 to 4;
reacting the silicon precursor with the substrate surface to form a silicon species on the substrate surface; and
reacting the silicon species on the substrate surface with the reactant, the reactant comprising a nitrogen-containing species or an oxygen-containing species and the silicon-containing film comprising one or more of SiCN, SiCO or SiCON, wherein the silicon-containing film has a carbon content greater than 20%.
2. The method of claim 1 , wherein the silicon precursor comprises one or more of SiA 4 , SiA 3 Cl, SiA 2 Cl 2 , SiACl 3 or SiA 2 H 2 .
3. The method of claim 1 , wherein the nitrogen-containing species comprises one or more of NH 3 , hydrazine, or N 2 .
4. The method of claim 1 , wherein the reactant comprises a plasma.
5. The method of claim 4 , further comprising changing one or more of plasma power, pressure, or temperature to change an amount of nitrogen or carbon in the silicon-containing film.
6. The method of claim 1 , wherein the oxygen-containing species comprises one or more of CO, CO 2 , O 2 , H 2 O or O 3 .
7. The method of claim 1 , wherein the substrate surface is maintained at a temperature of less than or equal to about 400° C.
8. The method of claim 1 , further comprising utilizing a metal precursor as a catalyst to form the silicon-containing film at a temperature below about 500° C.
9. The method of claim 1 , wherein the silicon precursor comprises >20% carbon.
10. A method of depositing a silicon-containing film, the method comprising:
exposing a substrate surface to a silicon precursor and a reactant, the silicon precursor having the general formula SiX 4-n A n where each X is independently a halide, alkyl, amine, hydrogen or combination thereof, A is an acetylide and n is 1 to 4;
reacting the substrate surface with the silicon precursor and the reactant, the reactant comprising a metal precursor and the silicon-containing film comprising one or more of MC or MSiC, wherein the silicon-containing film has a carbon content greater than 20%.
11. The method of claim 10 , wherein the silicon precursor comprises one or more of SiA 4 , SiA 3 Cl, SiA 2 Cl 2 , SiACl 3 or SiA 2 H 2 .
12. The method of claim 10 , wherein the silicon precursor and the reactant are mixed in the gas phase and reacted with the substrate surface.
13. The method of claim 10 , wherein the silicon precursor and the reactant are reacted with the substrate surface sequentially such that there is no gas phase mixing of the silicon precursor and the reactant.
14. The method of claim 10 , further comprising utilizing a metal precursor as a catalyst to form the silicon-containing film at a temperature below about 500° C.