Electrostatic protection element
An electrostatic protection element includes a substrate of a first conductivity type, an epitaxial layer formed on the substrate, the epitaxial layer being of a second conductivity type; a well formed on the epitaxial layer, the well being of the first conductivity type; a transistor formed inside of the well, the transistor including a drain region, a source region formed to face the drain region across a channel region, and a gate formed above the channel region so as to be insulated; and a well contact region of the first conductivity type disposed so as to form an opposing region where the drain region and the well contact region face each other while being separated by a prescribed distance in a direction parallel to at least an extension direction of the gate.
1. An electrostatic protection element, comprising:
a substrate of a first conductivity type having a first polarity;
an epitaxial layer of a second conductivity type having a second polarity different from the first polarity, the epitaxial layer formed on the substrate and having a well of the first conductivity type formed therein;
a transistor including a drain region formed in the well, a source region formed to face the drain region across a channel region, and a gate formed above the channel region so as to be insulated;
a well contact region of the first conductivity type disposed in the well, the well-contact region being formed at a prescribed distance from the drain region in a width direction perpendicular to a length direction of the gate, the well contact region formed so as to surround the transistor in the length direction and the width direction; and
an element isolation trench formed so as to surround the well contact region in the length direction and the width direction.
2. The electrostatic protection element according to claim 1 , wherein the well contact region is located on opposite sides of the transistor in the width direction, and the well contact region is located at opposite ends of the transistor in the length direction, the well contact region being separated from the transistor in the width direction and in the length direction by the well.
3. The electrostatic protection element according to claim 2 , wherein the transistor includes a plurality of transistors arranged in a row in the width direction, each of the plurality of transistors including a respective drain region and source region, and a gate between the drain region and the source region, and
wherein a first drain region located at one end of the plurality of transistors in the width direction is located a prescribed distance from the well contact region, thereby forming a first opposing region.
4. The electrostatic protection element according to claim 1 , further comprising an element isolation trench formed so as to surround the well contact region in the length direction and the width direction.
5. The electrostatic protection element according to claim 4 , wherein the transistor includes a plurality of transistors arranged in a row in the width direction, each of the plurality of transistors including a respective drain region and source region, and a gate between the drain region and the source region, and
wherein a first drain region located at one end of the plurality of transistors in the width direction is located a prescribed distance from the well contact region, thereby forming a first opposing region.
6. The electrostatic protection element according to claim 4 , wherein the element isolation trench is formed in a surface of the well so as to be deep enough to reach the substrate.
7. The electrostatic protection element according to claim 6 , wherein the transistor includes a plurality of transistors arranged in a row in the width direction, each of the plurality of transistors including a respective drain region and source region, and a gate between the drain region and the source region, and
wherein a first drain region located at one end of the plurality of transistors in the width direction is located a prescribed distance from the well contact region, thereby forming a first opposing region.
8. The electrostatic protection element according to claim 1 , wherein the transistor includes a plurality of transistors arranged in a row in the width direction, each of the plurality of transistors including a respective drain region and source region, and a gate between the drain region and the source region, and
wherein a first drain region located at one end of the plurality of transistors in the width direction is located a prescribed distance from the well contact region, thereby forming a first opposing region.
9. The electrostatic protection element according to claim 8 , further comprising a second drain region located at an opposite end of the plurality of transistors in the width direction from the first drain region,
wherein the second drain region faces the well contact region, thereby forming a second opposing region.
10. A semiconductor device, comprising:
an internal circuit having a connection terminal to be connected externally and configured to perform prescribed processes; and
the electrostatic protection element according to claim 1 in which the gate and the source region are grounded and the drain region is connected to the connection terminal.
11. The electrostatic protection element according to claim 1 , wherein a side of the drain region opposite the gate and the source region faces the well contact region across an opposing region.
12. The electrostatic protection element according to claim 11 , wherein the opposing region contacts the side of the drain region from one end to another end in the length direction.