Two-dimensional light modulating device and electronic apparatus including the same

1. A two-dimensional ( 2 D) light modulating device comprising:

a plurality of phase modulating elements comprising a meta surface having a nano-structure; and

a circuit board configured to independently control electrical signals that are respectively transmitted to the plurality of phase modulating elements, and comprising a plurality of pixel circuit units, wherein each of the plurality of pixel circuit units comprises a transistor and a capacitor,

wherein each of the plurality of phase modulating elements comprises:

a metal layer that is electrically connected to a corresponding pixel circuit unit among the plurality of pixel circuit units;

an active layer disposed on the metal layer, the active layer having a refractive index that changes based on an electrical signal transmitted from the corresponding pixel circuit unit;

a conductive nano-antenna disposed on the active layer;

a first insulating layer disposed between the active layer and the conductive nano-antenna; and

a second insulating layer disposed between the metal layer and the active layer.

2. The 2D light modulating device of claim 1 , wherein the active layer comprises a carrier-variable region where a concentration of carriers changes based on an applied voltage.

3. The 2D light modulating device of claim 2 , wherein the carrier variable region in the active layer is adjacent to the first insulating layer.

4. The 2D light modulating device of claim 1 , wherein the active layer comprises at least one of transparent conductive oxide, transition metal nitride, lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ), potassium tantalate niobate (KTN), lead zirconate titanate (PZT), and a polymer material having an electro-optic property.

5. The 2D light modulating device of claim 1 , wherein at least some of conductive nano-antennas of the plurality of phase modulating elements are electrically connected to each other, and

wherein a uniform electric potential is applied to the at least some of the conductive nano-antennas.

6. The 2D light modulating device of claim 1 , wherein active layers of the plurality of phase modulating elements are electrically connected to each other, and

wherein a uniform electric potential is applied to the active layers.

7. The 2D light modulating device of claim 1 , wherein the active layer comprises a carrier-variable region where a concentration of carriers changes based on an applied voltage, and

wherein the carrier variable region in the active layer is adjacent to the second insulating layer.

8. A two-dimensional (2D) light modulating device comprising:

a plurality of phase modulating elements comprising a meta surface having a nano-structure; and

a circuit board configured to independently control electrical signals that are respectively transmitted to the plurality of phase modulating elements, and comprising a plurality of pixel circuit units, wherein each of the plurality of pixel circuit units comprises a transistor and a capacitor,

wherein each of the plurality of phase modulating elements comprises:

a dielectric nano-antenna;

a metal layer that is separated from the dielectric nano-antenna and electrically connected to a corresponding pixel circuit unit among the plurality of pixel circuit units;

an active layer disposed above the metal layer, the active layer having a refractive index that changes based on an electrical signal from the corresponding pixel circuit unit; and

a transparent conductive layer disposed on the active layer.

9. The 2D light modulating device of claim 8 , wherein the refractive index of the active layer is less than a refractive index of the dielectric nano-antenna.

10. The 2D light modulating device of claim 9 , wherein the dielectric nano-antenna comprises a material having a dielectric constant that is equal to or greater than 10.

11. The 2D light modulating device of claim 8 , wherein transparent conductive layers of the plurality of phase modulating elements are electrically connected to each other, and

wherein a uniform electric potential is applied to the transparent conductive layers.

12. The 2D light modulating device of claim 8 , wherein the active layer, the transparent conductive layer, and the dielectric nano-antenna are sequentially arranged above the metal layer.

13. The 2D light modulating device of claim 12 , further comprising a spacer layer between the metal layer and the active layer, the spacer layer comprising a dielectric material.

14. The 2D light modulating device of claim 8 , wherein the dielectric nano-antenna, the active layer, and the transparent conductive layer are sequentially arranged above the metal layer.

15. The 2D light modulating device of claim 14 , wherein the active layer and the transparent conductive layer have a same shape as the dielectric nano-antenna when viewed from a plan view.

16. The 2D light modulating device of claim 14 , further comprising a spacer layer between the metal layer and the dielectric nano-antenna, the spacer layer comprising a dielectric material.

17. The 2D light modulating device of claim 1 , wherein the nano-structure has one of a circular shape, an oval shape, a polygonal shape, a cross shape, a star shape, and a shape in which two or more of the circular shape, the oval shape, the polygonal shape, the cross shape, and the star shape are combined.

18. A lidar device comprising:

a light source unit;

a two-dimensional (2D) light modulating device configured to steer light irradiated from the light source unit toward an object, the two-dimensional light modulating device comprising:

a plurality of phase modulating elements comprising a meta surface having a nano-structure, and

a circuit board independently controlling electrical signals that are respectively transmitted to the plurality of phase modulating elements, the circuit board comprising a plurality of pixel circuit units, and each of the plurality of pixel circuit units comprising a transistor and a capacitor,

wherein each of the plurality of phase modulating elements comprises:

a metal layer that is electrically connected to a corresponding pixel circuit unit among the plurality of pixel circuit units;

an active layer disposed on the metal layer, the active layer having a refractive index that changes based on an electrical signal transmitted from the corresponding pixel circuit unit;

a conductive nano-antenna disposed on the active layer;

a first insulating layer disposed between the active layer and the conductive nano-antenna; and

a second insulating layer disposed between the metal layer and the active layer; and

a sensor configured to receive the light that is steered by the 2D light modulating device, irradiated onto the object, and is reflected from the object.

19. A light modulating device comprising:

a circuit board comprising a pixel circuit unit configured to generate a control signal; and

a phase modulating element disposed on the pixel circuit unit and being configured to receive the control signal from the pixel circuit unit and modulate at least one of a phase, a direction, and a shape of incident light,

wherein the phase modulating element comprises:

a dielectric nano-antenna;

a metal layer that is separated from the dielectric nano-antenna and electrically connected to the pixel circuit unit;

an active layer disposed above the metal layer, the active layer having a refractive index that changes based on an electrical signal from the pixel circuit unit and

a transparent conductive layer disposed on the active layer

wherein a structure of the dielectric nano-antenna has at least one dimension that is smaller than a wavelength of the incident light.