Cyclic flowable deposition and high-density plasma treatment processes for high quality gap fill solutions
Implementations disclosed herein relate to methods for forming and filling trenches in a substrate with a flowable dielectric material. In one implementation, the method includes subjecting a substrate having at least one trench to a deposition process to form a flowable layer over a bottom surface and sidewall surfaces of the trench in a bottom-up fashion until the flowable layer reaches a predetermined deposition thickness, subjecting the flowable layer to a first curing process, the first curing process being a UV curing process, subjecting the UV cured flowable layer to a second curing process, the second curing process being a plasma or plasma-assisted process, and performing sequentially and repeatedly the deposition process, the first curing process, and the second curing process until the plasma cured flowable layer fills the trench and reaches a predetermined height over a top surface of the trench.
1. A method of processing a substrate, comprising:
subjecting a substrate having at least one trench to a deposition process to form a flowable layer over a bottom surface and sidewall surfaces of the trench in a bottom-up fashion until the flowable layer reaches a predetermined deposition thickness;
subjecting the flowable layer to a first curing process, the first curing process being a UV curing process; then
subjecting the UV cured flowable layer to a second curing process, the second curing process being a plasma or plasma-assisted process; and
performing sequentially and repeatedly the deposition process, the first curing process, and the second curing process until the plasma cured flowable layer fills the trench and reaches a predetermined height over a top surface of the trench.
2. The method of claim 1 , wherein the flowable layer is a silicon-containing dielectric layer.
3. The method of claim 1 , wherein the first curing process is performed in a radical-based ambient comprising oxygen, nitrogen, or an inert gas.
4. The method of claim 1 , wherein the second curing process is performed in oxygen/helium ambient, oxygen/argon ambient, or oxygen/hydrogen ambient.
5. The method of claim 4 , wherein the second curing process is performed in a radical-based ambient.
6. The method of claim 1 , wherein the flowable layer is deposited at a deposition rate of about 5 Angstroms/second or less.
7. The method of claim 1 , wherein the predetermined deposition thickness is in a range of about 20 Angstroms to about 300 Angstroms, and the predetermined height is in a range of about 500 Angstroms to about 8,000 Angstroms.
8. The method of claim 1 , wherein the flowable layer comprises SiC, SiO, SiCN, SiO 2 , SiOC, SiOCN, SiON, or SiN.
9. A method of processing a substrate, comprising:
performing a deposition process by reacting a silicon-containing precursor with an oxygen-based radical precursor and a nitrogen-based radical precursor to form a flowable layer within a trench of a substrate;
curing the flowable layer with UV energy in an oxygen-containing ambient, a nitrogen-containing ambient, or an inert gas ambient during a first curing process; then
curing the UV cured flowable layer in a plasma chamber during a second curing process, wherein the plasma chamber contains an oxygen-containing ambient or a nitrogen-containing ambient; and
performing sequentially and repeatedly the deposition process, the first curing process, and the second curing process until the plasma cured flowable layer fills the trench and reaches a predetermined height over a top surface of the trench.
10. The method of claim 9 , wherein the silicon-containing precursor comprises siloxane compounds or halogenated siloxane compounds that containing one or more halogen moieties.
11. The method of claim 9 , wherein curing the UV cured flowable layer further comprises:
bombarding the UV cured flowable layer with ions in an oxygen/helium ambient, an oxygen/argon ambient, or an oxygen/hydrogen ambient; and
bombarding the UV cured flowable layer with ions in an inert gas ambient.
12. The method of claim 11 , wherein the plasma chamber is an inductively coupled plasma (ICP) chamber.
13. The method of claim 11 , wherein curing the UV cured flowable layer further comprises:
applying a bias power to the substrate at a chamber pressure of about 5 mTorr or less.
14. The method of claim 9 , wherein curing the flowable layer with the UV energy is performed in a radical-based ambient.
15. A method of processing a substrate, comprising:
forming a flowable layer over a bottom surface and sidewall surfaces of a trench on a substrate in a bottom-up fashion during a deposition process;
exposing the flowable layer to UV energy to produce a UV cured flowable layer during a first curing process; then
exposing the UV cured flowable layer to a plasma to produce a plasma cured flowable layer during a second curing process; and
performing sequentially and repeatedly the deposition process, the first curing process, and the second curing process until the plasma cured flowable layer fills the trench and reaches a predetermined height over a top surface of the trench.
16. The method of claim 15 , wherein the flowable layer is a silicon-containing dielectric layer.
17. The method of claim 15 , wherein the flowable layer comprises SiC, SiO, SiCN, SiO 2 , SiOC, SiOCN, SiON, or SiN.
18. The method of claim 15 , wherein the flowable layer is deposited at a deposition rate of about 5 Angstroms/second or less.
19. The method of claim 15 , wherein the deposition process comprises reacting a silicon-containing precursor to form the flowable layer, and wherein the silicon-containing precursor comprises siloxane compounds or halogenated siloxane compounds containing one or more halogen moieties.
20. The method of claim 15 , wherein the predetermined height is in a range of about 500 Angstroms to about 8,000 Angstroms.