Trench plug hardmask for advanced integrated circuit structure fabrication
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon. A plurality of gate structures is over the fin, individual ones of the plurality of gate structures along a direction orthogonal to the fin and having a pair of dielectric sidewall spacers. A trench contact structure is over the fin and directly between the dielectric sidewalls spacers of a first pair of the plurality of gate structures. A contact plug is over the fin and directly between the dielectric sidewalls spacers of a second pair of the plurality of gate structures, the contact plug comprising a lower dielectric material and an upper hardmask material.
1. An integrated circuit structure, comprising:
a fin comprising silicon;
a plurality of gate structures over the fin, individual ones of the plurality of gate structures along a direction orthogonal to the fin and having a pair of dielectric sidewall spacers;
a trench contact structure over the fin and directly between the dielectric sidewall spacers of a first pair of the plurality of gate structures; and
a contact plug over the fin and directly between the dielectric sidewall spacers of a second pair of the plurality of gate structures without an intervening trench contact structure between the dielectric sidewall spacers of the second pair of the plurality of gate structures, the contact plug comprising a lower dielectric material and an upper hardmask material, the upper hardmask material having a rounded bottom surface.
2. The integrated circuit structure of claim 1 , wherein the lower dielectric material of the contact plug comprises silicon and oxygen, and the upper hardmask material of the contact plug comprises silicon and nitrogen.
3. The integrated circuit structure of claim 1 , wherein the trench contact structure comprises a lower conductive structure and a dielectric cap on the lower conductive structure.
4. The integrated circuit structure of claim 3 , wherein the dielectric cap of the trench contact structure has an upper surface co-planar with an upper surface of the upper hardmask material of the contact plug.
5. The integrated circuit structure of claim 1 , wherein individual ones of the plurality of gate structures comprise a gate electrode on a gate dielectric layer, and a dielectric cap on the gate electrode.
6. The integrated circuit structure of claim 5 , wherein the dielectric cap of the individual ones of the plurality of gate structures has an upper surface co-planar with an upper surface of the upper hardmask material of the contact plug.
7. The integrated circuit structure of claim 1 , wherein the fin is continuous with a bulk crystalline silicon substrate.
8. An integrated circuit structure, comprising:
a plurality of fins comprising silicon, individual ones of the plurality of fins along a first direction;
a plurality of gate structures over the plurality of fins, individual ones of the plurality of gate structures along a second direction orthogonal to the first direction, and individual ones of the plurality of gate structures having a pair of dielectric sidewall spacers;
a trench contact structure over a first fin of the plurality of fins and directly between the dielectric sidewall spacers of a pair of the gate structures; and
a contact plug over a second fin of the plurality of fins and directly between the dielectric sidewall spacers of the pair of the plurality of gate structures without an intervening trench contact structure between the dielectric sidewall spacers of the pair of the plurality of gate structures, the contact plug comprising a lower dielectric material and an upper hardmask material, the upper hardmask material having a rounded bottom surface.
9. The integrated circuit structure of claim 8 , wherein the lower dielectric material of the contact plug comprises silicon and oxygen, and the upper hardmask material of the contact plug comprises silicon and nitrogen.
10. The integrated circuit structure of claim 8 , wherein the trench contact structure comprises a lower conductive structure and a dielectric cap on the lower conductive structure.
11. The integrated circuit structure of claim 10 , wherein the dielectric cap of the trench contact structure has an upper surface co-planar with an upper surface of the upper hardmask material of the contact plug.
12. The integrated circuit structure of claim 8 , wherein individual ones of the plurality of gate structures comprise a gate electrode on a gate dielectric layer, and a dielectric cap on the gate electrode.
13. The integrated circuit structure of claim 12 , wherein the dielectric cap of the individual ones of the plurality of gate structures has an upper surface co-planar with an upper surface of the upper hardmask material of the contact plug.
14. The integrated circuit structure of claim 8 , wherein the plurality of fins is continuous with a bulk crystalline silicon substrate.