Semiconductor device, and method for manufacturing semiconductor device
A semiconductor device includes a base, a semiconductor element mounted on the base, a porous metal sintered body and a sealing member. The porous metal sintered body is provided on the base in an area different from an area on which the semiconductor element is mounted. The sealing member covers the semiconductor element. The sealing member is placed inside the porous metal sintered body.
1. A semiconductor device comprising:
a base;
a semiconductor element mounted on the base;
a porous metal sintered body provided on the base in an area different from an area on which the semiconductor element is mounted, the metal sintered body having silver as a main component; and
a sealing member covering the semiconductor element, the sealing member being placed inside the porous metal sintered body.
2. The semiconductor device according to claim 1 , wherein
the base has a base material with copper or a copper alloy as a main component.
3. The semiconductor device according to claim 1 , wherein
the base is plated with silver, gold, aluminum, or an alloy containing one or more of silver, gold and aluminum as a main component.
4. The semiconductor device according to claim 1 , wherein
the metal sintered body has a conical shape.
5. The semiconductor device according to claim 1 , further comprising
an additional metal sintered body, and
each of the metal sintered body and the additional metal sintered body has a size of 0.005 mm 2 to 1 mm 2 in a plan view.
6. The semiconductor device according to claim 1 , wherein
in a plan view, with respect to an area of the base covered by the sealing member, the metal sintered body occupies an area of 4% to 50%.
7. The semiconductor device according to claim 1 , wherein
the sealing member is at least one type selected from the group consisting of epoxy resin, silicone resin, modified epoxy resin, modified silicone resin, and unsaturated polyester resin.
8. The semiconductor device according to claim 1 , wherein
the semiconductor element is a semiconductor light emitting element.
9. A manufacturing method for a semiconductor device, comprising:
mounting a semiconductor element on a base;
applying a first metal powder sintering paste or second metal particles on an area of the base different from an area that the semiconductor element is mounted on, the first metal powder sintering paste containing first metal particles and a dispersion medium;
applying a temperature of 160° C. to 300° C. to the first metal powder sintering paste or the second metal particles, and sintering the first metal particles or the second metal particles to form a porous metal sintered body;
placing a sealing member on the base on which the porous metal sintered body is placed; and
curing the sealing member after the sealing member has infiltrated to an interior of the porous metal sintered body.
10. The manufacturing method of a semiconductor device according to claim 9 , wherein
the first metal particles and the second metal particles have silver as the main component.
11. The manufacturing method for a semiconductor device according to claim 9 , wherein
the first metal powder sintering paste is substantially free of resin.
12. The manufacturing method for a semiconductor device according to claim 9 , wherein
the sintering of the first metal particles includes removing the dispersion medium in the first metal powder sintering paste.
13. The manufacturing method for a semiconductor device according to claim 9 , wherein
the sintering of the first metal particles is performed in an oxygen atmosphere or an air atmosphere.
14. The manufacturing method for a semiconductor device according to claim 9 , wherein
before the applying of the first metal powder sintering paste or the second metal particles on the base, plating the base with silver, gold, aluminum, or an alloy containing one or more of silver, gold and aluminum as a main component.
15. A semiconductor device comprising:
a base having a base material with copper or a copper alloy as a main component;
a semiconductor element mounted on the base;
a porous metal sintered body provided on the base in an area different from an area on which the semiconductor element is mounted; and
a sealing member covering the semiconductor element, the sealing member being placed inside the porous metal sintered body.
16. The semiconductor device according to claim 15 , wherein
the base is plated with silver, gold, aluminum, or an alloy containing one or more of silver, gold and aluminum as a main component.
17. A semiconductor device comprising:
a base that is plated with silver, gold, aluminum, or an alloy containing one or more of silver, gold and aluminum as a main component;
a semiconductor element mounted on the base;
a porous metal sintered body provided on the base in an area different from an area on which the semiconductor element is mounted; and
a sealing member covering the semiconductor element, the sealing member being placed inside the porous metal sintered body.
18. The semiconductor device according to claim 17 , wherein
in a plan view, with respect to an area of the base covered by the sealing member, the metal sintered body occupies an area of 4% to 50%.
19. The semiconductor device according to claim 17 , wherein
the semiconductor element is a semiconductor light emitting element.