IP Library › Granted Patent US 10,714,337
Granted Patent B2
US 10,714,337 · App. 15/749,228 · Granted Jul 14, 2020

Process for growing nanowires or nanopyramids on graphitic substrates

Inventors: Dong Chul Kim (Trondheim, NO); Ida Marie Høiaas (Trondheim, NO); Mazid Munshi (Trondheim, NO); Bjørn Ove Fimland (Trondheim, NO); Helge Weman (Ecublens, CH); Dingding Ren (Trondheim, NO); Dasa Dheeraj (Trondheim, NO)
Assignees: CRAYONANO AS; NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU)
H01L21/0262H01L21/0254H01L21/02376H01L21/02458H01L21/02538H01L21/02603H01L21/02631H01L21/02639H01L21/02576H01L21/02579
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Quick Facts
Patent No.
US 10,714,337
App. No.
15/749,228
Granted
Jul 14, 2020
Kind
B2
Abstract

A process for growing nanowires or nanopyramids comprising: (I) providing a graphitic substrate and depositing AlGaN, InGaN, AlN or AlGa(In)N on said graphitic substrate at an elevated temperature to form a buffer layer or nanoscale nucleation islands of said compounds; (II) growing a plurality of semiconducting group III-V nanowires or nanopyramids, preferably III-nitride nanowires or nanopyramids, on the said buffer layer or nucleation islands on the graphitic substrate, preferably via MOVPE or MBE.

Claims (39)

1. A process for growing nanowires or nanopyramids comprising:

(I) providing a graphitic substrate and depositing AlGaN, InGaN, AlN or AlGa(In)N on said graphitic substrate at an elevated temperature to form nanoscale nucleation islands of AlGaN, InGaN, AlN or AlGa(In)N; and

(II) growing a plurality of semiconducting group III-V nanowires or nanopyramids on the nanoscale nucleation islands on the graphitic substrate, wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown axially and are therefore formed from a first section and a second section, wherein the first section and the second section are each doped with a different dopant to generate a p-n junction or p-i-n junction.

2. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown epitaxially from the nanoscale nucleation islands.

3. The process as claimed in claim 1 , wherein said graphitic substrate has a thickness of up to 20 nm.

4. The process as claimed in claim 1 , wherein a graphitic top contact layer is present on top of the plurality of semiconducting group III-V nanowires or nanopyramids.

5. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown with or without the presence of a catalyst.

6. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are GaN, AlGaN, AlN or InGaN.

7. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires are grown in the [111] (for cubic crystal structure) or (for hexagonal crystal structure) direction.

8. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise a tunnel junction.

9. An electronic device comprising a product obtained by the process as claimed in claim 1 , wherein the electronic device comprises a solar cell, photodetector, or LED.

10. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise a plurality of group III-nitride nanowires or nanopyramids.

11. The process as claimed in claim 1 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown via MOVPE or MBE.

12. A process for growing nanowires or nanopyramids comprising:

(I) providing a graphitic substrate and depositing AlGaN, InGaN, AlN or AlGa(In)N on said graphitic substrate at an elevated temperature to form nanoscale nucleation islands of AlGaN, InGaN, AlN or AlGa(In)N; and

(II) growing a plurality of semiconducting group III-V nanowires or nanopyramids on the nanoscale nucleation islands on the graphitic substrate, wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise an (Al)GaN/Al(Ga)N superlattice.

13. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown epitaxially from the nanoscale nucleation islands.

14. The process as claimed in claim 12 , wherein said graphitic substrate has a thickness of up to 20 nm.

15. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are doped.

16. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are core-shell nanowires or nanopyramids.

17. The process as claimed in claim 12 , wherein a graphitic top contact layer is present on top of the plurality of semiconducting group III-V nanowires or nanopyramids.

18. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown with or without the presence of a catalyst.

19. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires are grown in the [111] (for cubic crystal structure) or (for hexagonal crystal structure) direction.

20. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise a tunnel junction.

21. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise AlGaN and wherein each of the plurality of semiconducting AlGaN nanowires or nanopyramids has a concentration of Al that increases or decreases along an axial growth direction and/or a radial growth direction of the nanowire or nanopyramid.

22. An electronic device comprising a product obtained by the process as claimed in claim 12 , wherein the electronic device comprises a solar cell, photodetector, or LED.

23. The process as claimed in claim 12 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown via MOVPE or MBE.

24. A process for growing nanowires or nanopyramids comprising:

(I) providing a graphitic substrate and depositing AlGaN, InGaN, AlN or AlGa(In)N on said graphitic substrate at an elevated temperature to form nanoscale nucleation islands of AlGaN, InGaN, AlN or AlGa(In)N; and

(II) growing a plurality of semiconducting group III-V nanowires or nanopyramids on the nanoscale nucleation islands on the graphitic substrate, wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise AlGaN and wherein each of the plurality of semiconducting AlGaN nanowires or nanopyramids has a concentration of Al that increases or decreases along an axial growth direction and/or a radial growth direction of the nanowire or nanopyramid.

25. The process as claimed in claim 24 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown epitaxially from the nanoscale nucleation islands.

26. The process as claimed in claim 24 , wherein said graphitic substrate has a thickness of up to 20 nm.

27. The process as claimed in claim 24 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are doped.

28. The process as claimed in claim 24 , wherein a graphitic top contact layer is present on top of the plurality of semiconducting group III-V nanowires or nanopyramids.

29. The process as claimed in claim 24 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown with or without the presence of a catalyst.

30. The process as claimed in claim 24 , wherein the plurality of semiconducting group III-V nanowires are grown in the [111] (for cubic crystal structure) or (for hexagonal crystal structure) direction.

31. The process as claimed in claim 24 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids comprise a tunnel junction.

32. An electronic device comprising a product obtained by the process as claimed in claim 24 , wherein the electronic device comprises a solar cell, photodetector, or LED.

33. The process as claimed in claim 24 , wherein the plurality of semiconducting group III-V nanowires or nanopyramids are grown via MOVPE or MBE.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2018
From: KIM, DONG-CHUL; HØIAAS, IDA MARIE; MUNSHI, MAZID; FIMLAND, BJØRN OVE; WEMAN, HELGE; REN, DINGDING; DHEERAJ, DASA
To: NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY (NTNU); CRAYONANO AS
Reel/Frame 045729/0818 →
Priority Claims (2)
GB 1513567.6 · Jul 31, 2015 · national
GB 1600162.0 · Jan 5, 2016 · national
Continuity (1)
Related Publication 20180226242A1 · Aug 9, 2018