Method for forming silicon nitride film selectively on top surface

1. A method for fabricating a layer structure constituted by a dielectric film containing a Si—N bond in a recess formed in a substrate, comprising:

(i) simultaneously forming a dielectric film containing a Si—N bond on an upper surface and a bottom surface and a sidewall of the recess, wherein a top/bottom portion of the dielectric film formed on the upper surface and the bottom surface and a sidewall portion of the dielectric film formed on the sidewall are given different chemical resistance properties by bombardment of a plasma excited by applying voltage in a reaction space between two electrodes between which the substrate is placed in parallel to the two electrodes;

(ii) substantially removing one of but not both of the top/bottom portion and the sidewall portion of the dielectric film by etching which removes the one of the top/bottom portion and the sidewall portion of the dielectric film more predominantly than the other according to the different chemical resistance properties; and

(iii) obtaining a reference plasma density at which the chemical resistance properties of the top/bottom portion of the dielectric film and the sidewall portion of the dielectric film are substantially equivalent,

wherein the plasma in step (i) is a capacitively coupled plasma (CCP) which is excited by applying RF power to one of the two electrodes, wherein plasma density is lower than the reference plasma density,

wherein the etching in step (ii) removes the sidewall portion of the dielectric film selectively relative to the top/bottom portion of the dielectric film,

wherein obtaining the reference plasma density in step (iii) comprises performing the forming of dielectric films as recited in step (i), then determining the chemical resistance property by etching as recited in step (ii), then repeating these steps for a plurality of times using different plasma density values, then obtaining the reference plasma density at which the chemical resistance properties of the top/bottom portion of the dielectric film and the sidewall portion of the dielectric film are substantially equivalent, and

wherein the plasma density is modulable as a function of a ratio of high frequency RF power to a total of high frequency RF power and low frequency RF power constituting the RF power, wherein the plasma density decreases when increasing the ratio, wherein in step (i), solely the high frequency RF power is used, and the ratio is one, wherein the high-frequency RF power has a frequency of 1 MHz or higher, and the low-frequency RF power has a frequency of less than 1 MHz.

2. The method according to claim 1 , wherein the plasma is a plasma of Ar, N 2 , or O 2 .

3. The method according to claim 1 , wherein in step (i), a halogenated silane is used as a precursor.

4. The method according to claim 1 , wherein the etching is the wet etching, which is conducted using a solution of hydrogen fluoride (HF) or phosphoric acid.

5. A method for fabricating a layer structure constituted by a dielectric film containing a Si—N bond in a recess formed in a substrate, comprising:

(i) simultaneously forming a dielectric film containing a Si—N bond on an upper surface and a bottom surface and a sidewall of the recess, wherein a top/bottom portion of the dielectric film formed on the upper surface and the bottom surface and a sidewall portion of the dielectric film formed on the sidewall are given different chemical resistance properties by bombardment of a plasma excited by applying voltage in a reaction space between two electrodes between which the substrate is placed in parallel to the two electrodes;

(ii) substantially removing one of but not both of the top/bottom portion and the sidewall portion of the dielectric film by etching which removes the one of the top/bottom portion and the sidewall portion of the dielectric film more predominantly than the other according to the different chemical resistance properties; and

(iii) obtaining a reference plasma density at which the chemical resistance properties of the top/bottom portion of the dielectric film and the sidewall portion of the dielectric film are substantially equivalent,

wherein the plasma in step (i) is a capacitively coupled plasma (CCP) which is excited by applying RF power to one of the two electrodes, wherein plasma density is higher than the reference plasma density,

wherein the etching in step (ii) removes the top/bottom portion of the dielectric film selectively relative to the sidewall portion of the dielectric film,

wherein obtaining the reference plasma density comprises performing the forming of dielectric films as recited in step (i), then determining the chemical resistance property by etching as recited in step (ii), then repeating these steps for a plurality of times using different plasma density values, then obtaining the reference plasma density at which the chemical resistance properties of the top/bottom portion of the dielectric film and the sidewall portion of the dielectric film are substantially equivalent, and

wherein the plasma density is modulable as a function of a ratio of high frequency RF power to a total of high frequency RF power and low frequency RF power constituting the RF power, wherein the plasma density increases when decreasing the ratio, wherein in step (i), both the high frequency RF power and the low frequency RF power are used, and the ratio is less than one, wherein the high-frequency RF power has a frequency of 1 MHz or higher, and the low-frequency RF power has a frequency of less than 1 MHz.