Semiconductor chip and semiconductor package having the same
A semiconductor chip including a substrate including a plurality of chip areas and a line-shaped scribe area defining the chip areas, an integrated circuit (IC) structure on the chip area, the IC structure including a plurality of transistors and a plurality of stacked wiring structures connected to the transistors, and a warpage protector in the line-shaped scribe area and corresponding to the stacked wiring structures, the warpage protector supporting at least one side of the IC structure may be provided.
1. A semiconductor chip comprising:
a substrate including a plurality of chip areas and a line-shaped scribe area defining the chip areas;
an integrated circuit (IC) structure on the chip area, the IC structure including a plurality of transistors and a plurality of stacked wiring structures connected to the transistors; and
a warpage protector in the line-shaped scribe area and corresponding to the stacked wiring structures, the warpage protector supporting at least one side of the IC structure, the warpage protector including a first bar, a second bar, and a support pattern between the first bar and the second bar, the first bar in contact with the side of the IC structure, the second bar spaced apart from and in parallel with the first bar, the support pattern including a plurality of slant lines that are slanted at an angle with respect to the first and second bars and are continuously and alternately in contact with the first and second bars in a zigzag pattern.
2. The semiconductor chip of claim 1 , wherein the plurality of slant lines are spaced apart from each other by a same distance along the first and the second bars.
3. The semiconductor chip of claim 1 , wherein the plurality of slant lines form a plurality of triangular patterns continuously extending along the first and the second bars.
4. The semiconductor chip of claim 1 , wherein
the stacked wiring structures include,
a lowermost wiring connected to the transistors via a lower contact,
at least a middle wiring over the lowermost wiring and connected to the lowermost wiring via an upper contact, and
an uppermost wiring over the middle wiring and connected to the middle wiring via a via structure; and
the warpage protector includes a multilayer structure, the multilayer structure including,
a first warpage protector layer at a same level as the lowermost wiring,
a second warpage protector layer in contact with the first warpage protector layer, the second warpage protector layer being at a same level as the upper contact, and
a third warpage protector layer in contact with the second warpage protector layer, and the third warpage protector layer being at a same level as the middle wiring.
5. The semiconductor chip of claim 4 , wherein the stacked wiring structures include,
a peripheral connection plug connecting the lowermost wiring to a transistor, which is at a peripheral area of each of the chip areas, via a contact pad, and
a cell connection plug connecting the lowermost wiring to the substrate at a memory cell area of each of the chip areas via the lower contact; and
the warpage protector further includes a base warpage protector layer that is at a same level as the contact pad.
6. The semiconductor chip of claim 5 , wherein the first warpage protector laver, the second warpage protector layer, and the third warpage protector layer include one of copper (Cu) and aluminum (Al) and the base warpage protector layer includes any one of titanium (Ti), tantalum (Ta) and tungsten (W).
7. The semiconductor chip of claim 1 , wherein a pair of the first bar and the second bar and at least one of the plurality of slant lines provided between the first bar and the second bar are at a corner portion of the IC structure.
8. The semiconductor chip of claim 1 , wherein a pair of first bar and the second bar and at least one of the plurality of slant lines provided between the first bar and the second bar are at a central portion of the IC structure.
9. The semiconductor chip of claim 1 , further comprising:
at least a subsidiary pattern in the line-shaped scribe area of the substrate for inspecting process defects in a manufacturing process for manufacturing the semiconductor chip and in a packaging process for manufacturing a semiconductor package having the semiconductor chip.
10. The semiconductor chip of claim 9 , wherein the subsidiary pattern includes at least one of an aligning key pattern, an overlay key pattern, a test element group (TEG) pattern, or an optical critical dimension (OCD) pattern.
11. A semiconductor package comprising:
a circuit board including an electric circuit pattern;
a first semiconductor chip on the circuit board and electrically connected to the circuit board; and
a second semiconductor chip on the first semiconductor chip and electrically connected to the first semiconductor chip, each of first and the second semiconductor chips including,
a substrate including a plurality of chip areas and a line-shaped scribe area defining the chip areas,
an integrated circuit (IC) structure on the chip area, the IC structure including a plurality of transistors and a plurality of stacked wiring structures connected to the transistors, and
a warpage protector in the line-shaped scribe area and corresponding to the stacked wiring structures, the warpage protector supporting at least a side of the IC structure, the warpage protector including a first bar, a second bar, and a support pattern between the first bar and the second bar, the first bar in contact with the side of the IC structure, the second bar spaced apart from and in parallel with the first bar, the support pattern including a plurality of slant lines that are slanted at an angle with respect to the first and second bars and are continuously and alternately in contact with the first and second bars in a zigzag pattern.
12. The semiconductor package of claim 11 , further comprising:
a bump structure connecting the circuit board to the first semiconductor chip; and
an inter-chip connector connecting the first semiconductor chip to the second semiconductor chip.
13. A semiconductor package comprising:
a mother board including an electronic circuit pattern;
a system on chip (SoC) package on the mother board, the SOC package including an operational chip, the operational chip including one or more microprocessors; and
a multichip package on the SoC package, the multichip package including a controller and at least one memory chip, each of the operational chip and the memory chip including,
a substrate including a plurality of chip areas and a line-shaped scribe area defining the chip areas,
an integrated circuit (IC) structure on each of the chip area areas, the IC structure including a plurality of transistors and a plurality of stacked wiring structures connected to the transistors, and
a warpage protector in the line-shaped scribe area and corresponding to the stacked wiring structures, the warpage protector supporting at least one side of the IC structure, the warpage protector including a first bar, a second bar, and a support pattern between the first bar and the second bar, the first bar in contact with the side of the IC structure, the second bar spaced apart from and in parallel with the first bar, the support pattern including a plurality of slant lines that are slanted at an angle with respect to the first and second bars and are continuously and alternately in contact with the first and second bars in a zigzag pattern.
14. The semiconductor package of claim 13 , wherein:
the operational chip includes an application processor (AP); and
the memory chip includes at least one dynamic random access memory (DRAM) chip and at least one flash memory chip stacked on the DRAM chip.
15. The semiconductor package of claim 14 , further comprising:
a bump structure connecting the mother board to the system on chip (SoC) package; and
a penetration electrode connecting the system on chip (SoC) package and the multichip package.
16. The semiconductor chip of claim 1 , the line-shaped scribe area includes a kerf area and a buffer area around the kerf area, and the warpage protector is in the buffer area.
17. The semiconductor chip of claim 1 , the line-shaped scribe area includes a kerf area and a buffer area around the kerf area, the first bar and the second bar are in the buffer area, and the second bar faces the kerf area.
18. The semiconductor package of claim 11 , the line-shaped scribe area includes a kerf area and a buffer area around the ken area, and the warpage protector is in the buffer area.
19. The semiconductor package of claim 11 , the line-shaped scribe area includes a kerf area and a buffer area around the ken area, the first bar and the second bar are in the buffer area, and the second bar faces the ken area.