Submount and semiconductor laser device
The method includes the steps of: preparing a single crystal SiC including an upper surface 10 a and a lower surface 10 b and provided with a micropipe 11 penetrating from the upper surface 10 a to the lower surface 10 b ; forming a first seed layer 21 made of a metal material on the upper surface 10 a of the single crystal SiC; and forming a first plated layer 31 on the first seed layer 21 so as to close an upper end of the micropipe 11 , using an electroplating method.
1. A submount comprising:
a single crystal SiC including an upper surface and a lower surface and provided with a micropipe comprising a hollow interior and penetrating from the upper surface to the lower surface;
a first seed layer made of a metal material and provided on the upper surface of the single crystal SiC; and
a first plated layer provided on an upper surface of the first seed layer so as to close an upper end of the micropipe,
wherein the first plated layer covers a lateral surface of the first seed layer so as to directly close the upper end of the micropipe.
2. The submount according to claim 1 , wherein
a second seed layer made of a metal material is provided on the lower surface of the single crystal SiC, and
a second plated layer that closes a lower end of the micropipe is provided on the lower surface of the second seed layer.
3. The submount according to claim 2 , wherein a thickness of the first plated layer is greater than a thickness of the second plated layer.
4. The submount according to claim 1 , wherein the first plated layer is formed only on the upper surface side of the single crystal SiC.
5. The submount according to claim 1 , wherein the first seed layer has a thickness of 0.02 μm or more and 1.5 μm or less.
6. The submount according to claim 1 , wherein the first plated layer has a thickness of 1 μm or more and 100 μm or less.
7. The submount according to claim 1 , wherein the first seed layer includes at least one of Ti, Pt, Au, Ni, Pd, and Cu, and the first plated layer is made of Cu.
8. A semiconductor laser device comprising the submount according to claim 1 , wherein a semiconductor laser element is mounted on a lower surface side of the submount via a conductive member.
9. The semiconductor laser device according to claim 8 wherein the conductive member is a eutectic solder.
10. The semiconductor laser device according to claim 8 , wherein an intermediate layer is provided between the conductive member and the single crystal.
11. The submount according to claim 1 , wherein a length of a hollow interior among the interior of the micropipe is 1.5 μm or more.
12. The submount according to claim 1 , wherein a length of a hollow interior among the interior of the micropipe is 15 μm or more.
13. The submount according to claim 1 , wherein a length of a hollow interior among the interior of the micropipe is 30 μm or more.
14. The submount according to claim 1 , wherein a diameter of the micropipe is 0.1 μm or more and 100 μm or less.
15. The submount according to claim 1 , wherein the micropipe is a hollow pipe-like defect of the single crystal SiC, wherein the defect includes at least one of (a) a defect that extends in a direction perpendicular to a C-plane of a crystal, (b) a defect that extends diagonally with respect to the C-plane, and (c) a defect that is at least partially bent.