Surface stabilization of biosensors
A sensor apparatus includes a substrate, a semiconductor device disposed over the substrate, the semiconductor device having a surface electrode structure, and a saccharide coating formed over the surface electrode structure. The saccharide coating can be removed prior to use. The semiconductor device can further include a well and optionally a bead disposed in the well.
1. A packaged sensor apparatus comprising:
a semiconductor device disposed over a substrate, the semiconductor device including an array of sensors, each sensor including:
a chemical field effect transistor having a gate electrode structure; and
a surface electrode structure forming at least part of the gate electrode structure, the surface electrode structure formed of metal, metal nitride, metal oxide, or a combination thereof;
an aqueous-soluble saccharide coating formed over each surface electrode structure of the semiconductor device; and
a flow cell lid over the substrate and defining a flow cell between the flow cell lid and the substrate; and
wherein the aqueous-soluble saccharide coating is configured to be removed prior to use of the sensor apparatus.
2. The sensor apparatus of claim 1 , further comprising a well structure defined over the semiconductor device and defining a well, wherein each well and each corresponding surface electrode structure define a reaction chamber, the saccharide coating formed at least partially within the well.
3. The sensor apparatus of claim 2 , further comprising a bead disposed in the well, the saccharide coating formed over the bead.
4. The sensor apparatus of claim 3 , wherein the bead is conjugated to a nucleic acid.
5. The sensor apparatus of claim 3 , wherein the bead is a hydrogel bead.
6. The sensor apparatus of claim 3 , wherein the bead comprises a polymer selected from the group consisting of agarose; polyethylene glycol; polyoxybutylene; diethylacrylamide; polyoxyethylene; polyacrylamide; polyoxypropylene; N,N-polydimethylacrylamide; poly(N-isopropylacrylamide); polyvinylpyrrolidone; poly-N-hydroxyacrylamide; and any combination thereof.
7. The sensor apparatus of claim 6 , wherein the polymer is polyacrylamide.
8. The sensor apparatus of claim 1 , wherein the surface electrode structure includes a conductive structure and a sensor layer disposed over the conductive structure.
9. The sensor apparatus of claim 8 , wherein the sensor layer includes a ceramic layer.
10. The sensor apparatus of claim 1 , wherein the gate electrode structure includes a floating gate structure.
11. The sensor apparatus of claim 1 , wherein the saccharide coating includes a monosaccharide, a disaccharide, a polysaccharide, a derivation thereof, or a combination thereof.
12. The sensor apparatus of claim 11 , wherein the monosaccharide includes glucose, fructose, galactose, or a combination thereof.
13. The sensor apparatus of claim 11 , wherein the disaccharide includes sucrose, trehalose, maltose, or lactose.
14. The sensor apparatus of claim 13 , wherein the disaccharide includes sucrose.
15. The sensor apparatus of claim 13 , wherein the disaccharide includes trehalose.
16. The sensor apparatus of claim 1 , wherein the chemical field effect transistor is an ion-sensitive field effect transistor.
17. The sensor apparatus of claim 1 , wherein the saccharide coating is a conformal coating.
18. The sensor apparatus of claim 2 , wherein the saccharide coating is a conformal coating.
19. The sensor apparatus of claim 2 , wherein the saccharide coating fills the well.
20. The sensor apparatus of claim 1 , wherein the surface electrode structure includes a passivation layer.