Insulating material, electronic device and imaging apparatus
An electronic device includes a first electrode 31 , a light emitting/light receiving layer 20 formed on the first electrode 31 , and a second electrode 32 formed on the light emitting/light receiving layer 20 . The light emitting/light receiving layer 20 and/or the second electrode 32 is covered by an insulating layer 40 including a metal oxide that contains, as a main component, zinc oxide, while containing, as accessory components, at least two materials selected from the group consisting of aluminum oxide, magnesium oxide, niobium oxide, titanium oxide, molybdenum oxide and hafnium oxide.
1. An electronic device comprising:
a substrate;
a first electrode formed on the substrate;
a light receiving layer formed on the first electrode;
a second electrode formed on the light receiving layer; and
an amorphous insulating layer covering both of the light receiving layer and the second electrode, wherein the amorphous insulating layer includes a metal oxide, wherein the metal oxide contains zinc oxide and at least two materials selected from a group consisting of aluminum oxide, magnesium oxide, niobium oxide, titanium oxide, molybdenum oxide and hafnium oxide, wherein the metal oxide contains a greater amount of zinc oxide than the at least two materials, wherein light transmittance of the amorphous insulating layer to light of a wavelength of between 400 and 660 nm is at least 80%.
2. The electronic device according to claim 1 , wherein the metal oxide is at or between 5 and 30%, on a metallic atom basis.
3. The electronic device according to claim 1 , wherein the at least two materials include aluminum oxide and magnesium oxide.
4. The electronic device according to claim 1 , wherein the thickness of the amorphous insulating layer on the second electrode is 5×10 −8 to 7×10 −7 m.
5. The electronic device according to claim 1 , wherein the absolute value of an internal stress in the amorphous insulating layer is not more than 50 MPa.
6. The electronic device according to claim 1 , wherein the amorphous insulating layer is transparent.
7. The electronic device according to claim 1 , wherein a light transmittance of the second electrode to light of a wavelength of 400 to 660 nm is not less than 75%.
8. The electronic device according to claim 1 , wherein the light receiving layer includes an organic photoelectric conversion material.
9. The electronic device according to claim 8 , including a photoelectric conversion element.
10. An imaging apparatus comprising an electronic device, the electronic device comprising:
a substrate;
a first electrode formed on the substrate;
a light receiving layer formed on the first electrode;
a second electrode formed on the light receiving layer; and
an amorphous insulating layer covering both of the light receiving layer and the second electrode, wherein the amorphous insulating layer includes a metal oxide, wherein the metal oxide contains zinc oxide and at least two materials selected from a group consisting of aluminum oxide, magnesium oxide, niobium oxide, titanium oxide, molybdenum oxide and hafnium oxide, wherein the metal oxide contains a greater amount of zinc oxide than the at least two materials, wherein light transmittance of the amorphous insulating layer to light of a wavelength of between 400 and 660 nm is at least 80%.
11. An amorphous insulating material including a metal oxide that contains zinc oxide and at least two materials selected from a group consisting of aluminum oxide, magnesium oxide, niobium oxide, titanium oxide, molybdenum oxide and hafnium oxide, wherein the metal oxide contains a greater amount of zinc oxide than the at least two materials, wherein light transmittance of the amorphous insulating material to light of a wavelength of between 400 and 660 nm is at least 80%.