Group 6 transition metal-containing compounds for vapor deposition of group 6 transition metal-containing films
Disclosed are Group 6 film forming compositions comprising Group 6 transition metal-containing precursors selected from the group consisting of: M(═O) 2 (OR) 2 Formula I, M(═O)(NR 2 ) 4 Formula II, M(═O) 2 (NR 2 ) 2 Formula III, M(═NR) 2 (OR) 2 Formula IV, and M(═O)(OR) 4 Formula V, wherein M is Mo or W and each R is independently H, a C1 to C6 alkyl group, or SiR′ 3 , wherein R′ is H or a C1 to C6 alkyl group. Also disclosed are methods of synthesizing and using the disclosed compositions to deposit Group 6 transition metal-containing films on substrates via vapor deposition processes.
1. A Mo film forming composition comprising a precursor selected from the group consisting of:
Mo(═O) 2 (NR 2 ) 2 Formula II, and
Mo(═NR) 2 (OR) 2 Formula III,
wherein each R is independently H, a C1 to C6 alkyl group, or SiR′ 3 , wherein R′ is H or a C1 to C6 alkyl group and wherein a purity of the precursor in the Mo film forming composition is approximately 99.9% or greater with less than 0.1% of following impurities combined: Mo(═NR)Cl(OR) wherein R is defined as above, alkylamines, dialkylamines, alkylimines, alkoxies, THF, ether, toluene, chlorinated metal compounds, lithium or sodium alkoxy, and lithium or sodium amide.
2. The Mo film forming composition of claim 1 , wherein each R is independently selected from the group consisting of H, Me, Et, nPr, iPr, nBu, iBu, sBu, tBu, tAmyl and SiMe 3 .
3. The Mo film forming composition of claim 1 , wherein the precursor has the formula Mo(═O) 2 (NR 2 ) 2 .
4. The Mo film forming composition of claim 2 , wherein the precursor has the formula Mo(═O) 2 (NR 2 ) 2 .
5. The Mo film forming composition of claim 1 , wherein the precursor has the formula Mo(═NR) 2 (OR) 2 .
6. The Mo film forming composition of claim 2 , wherein the precursor has the formula Mo(═NR) 2 (OR) 2 .
7. The Mo film forming composition of claim 6 , wherein the precursor is Mo(═NtBu) 2 (OtBu) 2 .
8. A method of depositing a Mo-containing film on a substrate, comprising the steps of: introducing a vapor of the Mo film forming composition of claim 1 into a reactor having a substrate disposed therein and depositing at least part of the precursor onto the substrate.
9. The method of claim 8 , further comprising introducing at least one reactant into the reactor.
10. The method of claim 9 , wherein the reactant is selected from the group consisting of H 2 , H 2 CO N 2 H 4 , NH 3 , SiH 4 , Si 2 H 6 , Si 3 H 8 , SiH 2 Me 2 , SiH 2 Et 2 , N(SiH 3 ) 3 , hydrogen radicals thereof, and mixtures thereof.
11. The method of claim 9 , wherein the reactant is selected from the group consisting of: O 2 , O 3 , H 2 O, H 2 O 2 , NO, N 2 O, NO 2 , oxygen radicals thereof, and mixtures thereof.
12. The method of claim 9 , wherein the Mo film forming composition and the reactant are introduced into the reactor simultaneously and the reactor is configured for chemical vapor deposition.
13. The method of claim 9 , wherein the Mo film forming composition and the reactant are introduced into the chamber sequentially and the reactor is configured for atomic layer deposition.
14. The method of claim 8 , wherein each R is independently selected from the group consisting of H, Me, Et, nPr, iPr, nBu, iBu, sBu, tBu, tAmyl and SiMe 3 .
15. The method of claim 8 , wherein the precursor has the formula Mo(═O) 2 (NR 2 ) 2 .
16. The method of claim 14 , wherein the precursor has the formula Mo(═O) 2 (NR 2 ) 2 .
17. The method of claim 8 , wherein the precursor has the formula Mo(═NR) 2 (OR) 2 .
18. The method of claim 14 , wherein the precursor has the formula Mo(═NR) 2 (OR) 2 .
19. The method of claim 18 , wherein the precursor is Mo(═NtBu) 2 (OtBu) 2 .
20. The Mo film forming composition of claim 1 , wherein a metal impurity level in the Mo film forming compositions is 10 ppm or less by weight for Aluminum (Al), Arsenic (As), Barium (Ba), Beryllium (Be), Bismuth (Bi), Cadmium (Cd), Calcium (Ca), Chromium (Cr), Cobalt (Co), Copper (Cu), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Zirconium (Zr), Indium (In), Iron (Fe), Lead (Pb), Lithium (Li), Magnesium (Mg), Manganese (Mn), Tungsten (W), Nickel (Ni), Potassium (K), Sodium (Na), Strontium (Sr), Thorium (Th), Tin (Sn), Titanium (Ti), Uranium (U), Vanadium (V) and Zinc (Zn).