Asymmetric out-of-plane accelerometer
A microelectromechanical (MEMS) accelerometer senses linear acceleration perpendicular to a MEMS device plane of the MEMS accelerometer based on a rotation of a proof mass out-of-plane about a rotational axis. A symmetry axis is perpendicular to the rotational axis. The proof mass includes a symmetric portion that is symmetric about the symmetry axis and that is contiguous with an asymmetric portion that is asymmetric about the symmetry axis.
1. A microelectromechanical (MEMS) accelerometer, comprising:
one or more anchors;
a proof mass within a MEMS device layer comprising a plurality of contiguous portions that rotate collectively about a rotational axis in response to a linear acceleration along a sense axis, wherein the plurality of contiguous portions of the proof mass comprise:
a symmetric portion that is symmetric about a symmetry axis wherein the symmetry axis is perpendicular to the rotational axis; and
an asymmetric portion that is asymmetric about the symmetry axis; and
one or more springs within the MEMS device layer and coupling the proof mass to the one or more anchors, wherein the one or more springs couple the proof mass to the one or more anchors such that the proof mass rotates about the rotational axis in response to the linear acceleration along the sense axis, and wherein the asymmetric portion does not extend through either the rotational axis or the symmetry axis.
2. The MEMS accelerometer of claim 1 , wherein the rotation about the rotational axis causes the proof mass to move out of plane.
3. The MEMS accelerometer of claim 2 , wherein the symmetric portion simultaneously rotates both above and below the MEMS device plane in response to the rotation and wherein the asymmetric portion only moves above or below the MEMS device plane at any one time.
4. The MEMS accelerometer of claim 2 , wherein the proof mass experiences a rotational motion in the MEMS device plane in response to a force that is in the MEMS device plane.
5. The MEMS accelerometer of claim 4 , further comprising a plurality of bump stops, wherein at least one of the plurality of bump stops is located adjacent to the asymmetric portion to prevent the rotational motion in the MEMS device plane.
6. The MEMS accelerometer of claim 5 , wherein the at least one of the plurality of bump stops contacts the asymmetric portion at least a 15 degree angle in response to the rotational motion in the MEMS device plane.
7. The MEMS accelerometer of claim 1 , wherein the asymmetric portion has a mass that is at least 20% of the mass of the symmetric portion.
8. The MEMS accelerometer of claim 1 , wherein the symmetric portion includes a plurality of extensions that are adjacent to at least three sides of the one more anchors.
9. The MEMS accelerometer of claim 8 , wherein the asymmetric portion is not adjacent to any sides of the one or more anchors.
10. The MEMS accelerometer of claim 9 , wherein the plurality of extensions is substantially rectangular in shape.
11. The MEMS accelerometer of claim 9 , wherein the asymmetric portion is substantially rectangular in shape.
12. The MEMS accelerometer of claim 1 , further comprising:
one or more second anchors;
a second proof mass within the MEMS device layer comprising a plurality of second contiguous portions that rotate collectively about a second rotational axis in response to the linear acceleration along the sense axis, wherein the plurality of second contiguous portions of the second proof mass comprise:
a second symmetric portion that is symmetric about a second symmetry axis wherein the second symmetry axis is perpendicular to the second rotational axis; and
a second asymmetric portion that is asymmetric about the second symmetry axis; and
one or more second springs within the MEMS device layer and coupling the second proof mass to the one or more second anchors, wherein the one or more second springs couple the second proof mass to the one or more second anchors such that the second proof masses rotate about the second rotational axis in response to the linear acceleration along the sense axis.
13. The MEMS accelerometer of claim 12 , wherein the second proof mass and the proof mass have a substantially identical shape.
14. The MEMS accelerometer of claim 12 , wherein the rotation of the second proof mass in response to the linear acceleration and the rotation of the proof mass in response to the linear acceleration are in anti-phase.
15. The MEMS accelerometer of claim 14 , wherein at least part of the first asymmetric portion is located adjacent to at least a part of the second symmetric portion, and wherein at least part of the second asymmetric portion is located adjacent to at least part of the first symmetric portion.
16. The MEMS accelerometer of claim 12 , wherein the first rotational axis and the second rotational axis comprise the same axis.
17. The MEMS accelerometer of claim 12 , wherein the first rotational axis and the second rotational axis are parallel to each other.