Plating for thermal management
Described examples include a process that includes forming a diffusion barrier layer on a backside of a semiconductor wafer. The process also includes forming a seed copper layer on the diffusion barrier layer. The process also includes forming a copper layer on the seed copper layer. The process also includes immersion plating a silver layer on the copper layer.
1. A process comprising:
forming a diffusion barrier layer on a backside of a semiconductor wafer;
forming a seed copper layer on the diffusion barrier layer;
forming a copper layer on the seed copper layer; and
immersion plating a silver layer on the copper layer.
2. The process of claim 1 in which the diffusion barrier layer is a titanium-tungsten layer.
3. The process of claim 1 in which the immersion plating is in an immersion solution that includes an organic solderability preservative.
4. The process of claim 1 in which the forming a seed copper layer is sputtering the seed copper layer.
5. The process of claim 1 in which the forming a copper layer is plating the copper layer.
6. The process of claim 1 further including:
patterning the copper layer, the seed copper layer and the diffusion barrier layer; and
dicing the semiconductor wafer.
7. The process of claim 1 in which the backside is opposite an active side and active components are formed in the active side.
8. The process of claim 7 further comprising forming a polymer layer on the active side of the semiconductor wafer.
9. A semiconductor device comprising:
a diffusion barrier layer on a backside of a semiconductor die;
a seed copper layer on the diffusion barrier layer;
a copper layer on the seed copper layer;
a silver layer formed by immersion plating on the copper layer; and
a conductive connection extending from an active side of the semiconductor die, the conductive connection including copper and titanium-tungsten.
10. The semiconductor device of claim 9 in which the diffusion barrier layer is a titanium-tungsten layer.
11. The semiconductor device of claim 9 in which the immersion plating is in an immersion solution that includes an organic solderability preservative.
12. The semiconductor device of claim 9 in which the seed copper layer is formed by sputtering the seed copper layer.
13. The semiconductor device of claim 9 in which the copper layer is formed by plating the copper layer.
14. The semiconductor device of claim 9 in which the conductive connection includes a pillar shape.
15. The semiconductor device of claim 9 in which the conductive connection includes a titanium-tungsten layer (TiW), a seed copper layer, and a plated copper layer.
16. The semiconductor device of claim 9 in which the backside is opposite the active side, active components are formed in the active side, and in which the conductive connection is coupled to the active components having a contact not covered by an encapsulant.
17. The semiconductor device of claim 16 in which the encapsulant is mold compound.
18. A process comprising:
forming a silver layer on a die;
immersing the silver layer in a solution in (3-mercapto)R, where R is selected from a group of trimethoxysilane, triethoxysilane and methyldimethoxysilane; and
adhering a conductive paste to the conductive layer.
19. The process of claim 18 in which the conductive paste is silver paste.
20. The process of claim 18 in which the solution is 97% by volume methanol and 3% by volume (3-mercapto)trimethoxysilane.