IP Library › Granted Patent US 10,734,445
Granted Patent B2
US 10,734,445 · App. 15/910,786 · Granted Aug 4, 2020

Storage device

Inventors: Minoru Oda (Yokkaichi Mie, JP); Akira Yotsumoto (Yokkaichi Mie, JP); Kotaro Noda (Yokkaichi Mie, JP)
Assignee: TOSHIBA MEMORY CORPORATION
H01L27/2454H01L23/528H01L27/249H01L29/45H01L29/66742H01L29/78642H01L21/31116H01L21/76802H01L21/76843H01L21/76877H01L29/0676
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Quick Facts
Patent No.
US 10,734,445
App. No.
15/910,786
Granted
Aug 4, 2020
Kind
B2
Abstract

A storage device including a transistor portion including a transistor, a plurality of interlayer insulating films provided above the transistor portion, a plurality of first conductive layers provided respectively between the plurality of interlayer insulating films, and a second conductive layer extending through the plurality of interlayer insulating films and the plurality of first conductive layers, the second conductive layer having one end electrically connected to the transistor portion, and a part that extends beyond a portion of the transistor portion.

Claims (12)

1. A storage device, comprising:

a transistor portion comprising a transistor and a gate electrode;

a plurality of interlayer insulating films provided above the transistor portion;

a plurality of first conductive layers provided respectively between the plurality of interlayer insulating films;

a second conductive layer extending through the plurality of interlayer insulating films and the plurality of first conductive layers, the second conductive layer having a first end electrically connected to the transistor portion, and a part that extends beyond a portion of the transistor portion; and

a first insulating film provided between the part of the second conductive layer and the gate electrode, wherein the part of the second conductive layer is connected to the first insulating film.

2. The storage device according to claim 1 , wherein the transistor portion further comprises a barrier metal layer provided between the transistor and the plurality of interlayer insulating films.

3. The storage device according to claim 2 , wherein the part of the second conductive layer extends beyond a part of the barrier metal layer.

4. The storage device according to claim 1 , wherein the part of the second conductive layer contacts a side surface of the transistor.

5. The storage device according to claim 1 , wherein the part of the second conductive layer extends beyond a part of the barrier metal layer.

6. The storage device according to claim 5 , wherein the part of the second conductive layer contacts a side surface of the barrier metal layer.

7. The storage device according to claim 6 , wherein the part of the second conductive layer extends beyond the barrier metal layer and contacts a side surface of the transistor.

Assignments (4)
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2018
From: ODA, MINORU; YOTSUMOTO, AKIRA; NODA, KOTARO
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 045509/0926 →
Priority Claims (1)
JP 2017-179788 · Sep 20, 2017 · national
Continuity (1)
Related Publication 20190088719A1 · Mar 21, 2019