Electronic device, manufacturing method for electronic device, and electronic apparatus
An electronic device includes, a semiconductor layer, a source region and a drain region provided with the semiconductor layer to be interposed therebetween, a gate insulation film on the semiconductor layer between the source region and the drain region, and a gate of a graphene on the gate insulation film. The gate insulation film induces doping of charges in the graphene.
1. An electronic device comprising:
a semiconductor layer;
a source region and a drain region provided with the semiconductor layer to be interposed therebetween;
a gate insulation film on the semiconductor layer between the source region and the drain region, the gate insulation film configured to induce doping of charges in a graphene;
a source electrode which is provided over the gate insulation film which overlies the source region and is not in contact with the graphene;
a drain electrode which is provided over the gate insulation film which overlies the drain region and is not in contact with the graphene; and
a gate of the graphene over the gate insulation film.
2. The electronic device according to claim 1 , wherein the gate insulation film includes:
a first insulation film on the semiconductor layer; and
a second insulation film on the first insulation film, configured to be in contact with the graphene, wherein the second insulation film induces the doping of charges in the graphene.
3. The electronic device according to claim 1 , wherein the gate insulation film has a polarity, and induces the doping of charges in the graphene by generating charges corresponding to the polarity in the graphene.
4. The electronic device according to claim 1 , wherein the gate insulation film induces the doping of charges in the graphene by donating charges to the graphene or by attracting charges from the graphene.
5. The electronic device according to claim 1 , wherein, when the gate insulation film is disposed in an atmosphere containing a first substance and a second substance that is different from the first substance, the gate insulation film induces the doping of charges opposite to charges generated, in the graphene, when one of the first substance and the second substance is adsorbed onto the graphene.
6. The electronic device according to claim 1 , further comprising:
a protective film configured to cover the graphene.
7. An electronic apparatus comprising:
an electronic device including:
a semiconductor layer;
a source region and a drain region provided with the semiconductor layer to be interposed therebetween;
a gate insulation film on the semiconductor layer between the source region and the drain region, the gate insulation film configured to induce doping of charges in a graphene;
a source electrode which is provided over the gate insulation film which overlies the source region and is not in contact with the graphene;
a drain electrode which is provided over the gate insulation film which overlies the drain region and is not in contact with the graphene; and
a gate of the graphene over the gate insulation film, and peripheral circuitry coupled to the electronic device.
8. A manufacturing method for an electronic device comprising:
forming a source region and a drain region apart from each other in a semiconductor layer;
forming a gate insulation film on the semiconductor layer between the source region and the drain region, the gate insulation film configured to induce doping of charges in a graphene;
forming a source electrode over the gate insulation film which overlies the source region in such a manner that the source electrode is not in contact with the graphene;
forming a drain electrode which is provided over the gate insulation film which overlies the drain region in such a manner that the drain electrode is not in contact with the graphene; and
forming a gate of the graphene over the gate insulation film.
9. The method according to claim 8 , wherein the gate insulation film includes a first insulation film on the semiconductor layer and a second insulation film on the first insulation film, and the second insulation film is configured to induce doping of charges in the graphene.
10. The method according to claim 8 , wherein the gate insulation film has a polarity, and induces the doping of charges in the graphene by generating charges corresponding to the polarity in the graphene.
11. The method according to claim 8 , wherein the gate insulation film induces the doping of charges in the graphene by donating charges to the graphene or by attracting charges from the graphene.
12. The method according to claim 8 , further comprising forming a protective film on the graphene.