Shutoff-opening device
A first on-off valve ( 2 ) and a second on-off valve ( 3 ) each are a two-port valve. A first passage block ( 5 ) is provided with a first on-off valve-corresponding inflow passage ( 11 ) and a first on-off valve-corresponding outflow passage ( 12 ). A second passage block ( 6 ) is provided with a second on-off valve-corresponding inflow passage ( 14 ) and a second on-off valve-corresponding outflow passage ( 15 ). The second on-off valve-corresponding outflow passage ( 15 ) is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage ( 12 ) via a communicating passage ( 13 ) formed in the first passage block ( 5 ). An orifice ( 20 ) is provided between the second on-off valve-corresponding outflow passage ( 15 ) and the communicating passage ( 13 ).
1. A shutoff-opening device in a gas supply section of semiconductor manufacturing equipment, comprising:
a first on-off valve, which supplies a process gas, disposed on a front end of the shutoff-opening device;
a second on-off valve, which supplies a purge gas, adjacent to a rear side of the first on-off valve; and
a passage block supporting the first on-off valve and the second on-off valve on a top surface of the passage block, wherein
each of the first on-off valve and the second on-off valve is a two-port valve, and
the passage block is provided with:
a first on-off valve-corresponding inflow passage which is directly open to an exterior of the passage block via a first on-off valve-corresponding communicating passage, through which the process gas flows,
a first on-off valve-corresponding outflow passage which is directly open to the exterior of the passage block,
a second on-off valve-corresponding inflow passage which is directly open to the exterior of the passage block, and
a second on-off valve-corresponding outflow passage directly connected to a communicating passage,
the second on-off valve-corresponding outflow passage is in communication with the first on-off valve-corresponding outflow passage directly via a the communicating passage formed in the passage block without passing through an inside of the first on-off valve, and
an orifice gasket having a through hole diameter which is smaller than a diameter of the second on-off valve-corresponding outflow passage and a diameter of the communicating passage, the orifice gasket forming a throttling portion connected between the second on-off valve-corresponding outflow passage and the communicating passage, to prevent backflow from the communicating passage to the second on-off valve-corresponding outflow passage.
2. The shutoff-opening device according to claim 1 , further comprising:
a third on-off valve disposed on a rear end of the shutoff-opening device and adjacent to a rear side of the second on-off valve and supported by the passage block, the third on-off valve controlling a vent line connected to the first on-off valve corresponding communication passage, wherein
the third on-off valve is a two-port valve, and
the passage block is provided with:
a third on-off valve-corresponding inflow passage, and
a third on-off valve-corresponding outflow passage, and
the first on-off valve-corresponding communicating passage has one end that is directly open to an outer surface of the passage block, and the first on-off valve-corresponding communicating passage is in communication with the third on-off valve-corresponding outflow passage.