Hydrogen sensing device
A hydrogen sensing device includes a multi-layered structure member. The multi-layered structure member includes a stack of alternatingly disposed magnetic layers and non-ferromagnetic layers. One of the magnetic layers is a topmost layer of the multi-layered structure member. The topmost layer includes a palladium-based material to detect hydrogen.
1. A hydrogen sensing device, comprising:
a multi-layered structure member including a stack, of alternatingly disposed magnetic layers and non-ferromagnetic layers,
wherein one of said magnetic layers is a topmost layer of said multi-layered structure member; and
wherein said topmost layer includes a palladium-based material to detect hydrogen; and
wherein the palladium-based material includes a palladium-based alloy that includes 50% to 95% of palladium and a balance of cobalt.
2. The hydrogen sensing device of claim 1 , wherein each of said magnetic layers includes the palladium-based material.
3. The hydrogen sensing device of claim 1 , wherein said non-ferromagnetic layers include a non-ferromagnetic material selected from the group consisting of copper (Cu), silver (Ag), gold (Au), chromium (Cr), aluminum (Al), tantalum (Ta) and alloys thereof.
4. The hydrogen sensing device of claim 3 , wherein the non-ferromagnetic material includes Cu.
5. The hydrogen sensing device of claim 1 , wherein each of said magnetic layers and said non-ferromagnetic layers has a thickness ranging from 0.5 nm to 5 nm.
6. The hydrogen sensing device of claim 1 , wherein a total number of said magnetic layers and said non-ferromagnetic layers ranges from 3 to 50.
7. The hydrogen sensing device of claim 1 , further comprising a substrate that is connected to a bottom surface of said multi-layered structure member opposite to said topmost layer.
8. The hydrogen sensing device of claim 7 , further comprising a seed layer formed between said substrate and said bottom surface of said multi-layered structure member.
9. The hydrogen sensing device of claim 8 , wherein said seed layer includes iron.