Selective deposition utilizing sacrificial blocking layers for semiconductor devices
Methods of selectively depositing high-K gate dielectric on a semiconductor structure are disclosed. The method includes providing a semiconductor structure disposed above a semiconductor substrate. The semiconductor structure is disposed beside an isolation sidewall. A sacrificial blocking layer is then selectively deposited on the isolation sidewall and not on the semiconductor structure. Thereafter, a high-K gate dielectric is deposited on the semiconductor structure, but not on the sacrificial blocking layer. Properties of the sacrificial blocking layer prevent deposition of oxide material on its surface. A thermal treatment is then performed to remove the sacrificial blocking layer, thereby forming a high-K gate dielectric only on the semiconductor structure.
1. A semiconductor device, comprising:
a semiconductor structure disposed above a semiconductor substrate;
an isolation structure comprising an isolation sidewall disposed beside the semiconductor structure and above the semiconductor substrate, the isolation structure having a top surface;
a high-K dielectric layer disposed directly on more than one side of the semiconductor structure and not disposed along the isolation sidewall;
a gate electrode disposed on the high-K dielectric layer and along the isolation sidewall; and
a molecular fragment layer disposed between the gate electrode and the isolation sidewall, wherein the molecular fragment layer is directly on the isolation sidewall and is directly on the top surface of the isolation structure.
2. The semiconductor device of claim 1 , further comprising:
a shallow trench isolation (STI) disposed directly on top of the semiconductor substrate.
3. The semiconductor device of claim 2 , wherein the high-K dielectric layer is also disposed on the STI.
4. The semiconductor device of claim 2 , wherein the molecular fragment layer is also disposed on the STI.
5. The semiconductor device of claim 4 , wherein the molecular fragment layer is further disposed between the gate electrode and the STI.
6. The semiconductor device of claim 1 , wherein the high-K dielectric layer comprises a metal.
7. The semiconductor device of claim 1 , wherein the semiconductor structure is a fin that extends upward from the semiconductor substrate.
8. The semiconductor device of claim 7 , wherein the more than one side includes a top surface of the fin and a portion of each sidewall of the fin.
9. The semiconductor device of claim 1 , wherein the semiconductor structure is a nanowire disposed above the semiconductor substrate.
10. The semiconductor device of claim 9 , wherein the more than one side includes a top surface of the nanowire, sidewall surfaces of the nanowire, and a bottom surface of the nanowire, the bottom surface opposite the top surface, and the sidewall surfaces between the top surface and the bottom surface.
11. The semiconductor device of claim 1 , wherein the isolation sidewall comprises gate spacers.
12. A computing device, comprising: a board; and a component coupled to the board, the component including an integrated circuit structure, comprising:
a semiconductor structure disposed above a semiconductor substrate; a structure comprising an isolation sidewall disposed beside the semiconductor structure and above the semiconductor substrate, the isolation structure having a top surface; a high-K dielectric layer disposed directly on more than one side of the semiconductor structure and not disposed along the isolation sidewall; a gate electrode disposed on the high-K dielectric layer and along the isolation sidewall; and a molecular fragment layer disposed between the gate electrode and the isolation sidewall, wherein the molecular fragment layer is directly on the isolation sidewall and is directly on the top surface of the isolation structure.
13. The computing device of claim 12 , further comprising:
a memory coupled to the board.
14. The computing device of claim 12 , further comprising:
a communication chip coupled to the board.
15. The computing device of claim 12 , further comprising:
a camera coupled to the board.
16. The computing device of claim 12 , further comprising:
a battery coupled to the board.
17. The computing device of claim 12 , further comprising:
an antenna coupled to the board.
18. The computing device of claim 12 , wherein the component is a packaged integrated circuit die.
19. The computing device of claim 12 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.