Spin-orbit-torque magnetization rotational element, spin-orbit-torque magnetoresistance effect element, magnetic memory, and spin-orbit-torque magnetization rotational element manufacturing method
A spin-orbit-torque magnetization rotational element includes: a spin-orbit-torque wiring which extends in a first direction; and a first ferromagnetic layer which is laminated in a second direction intersecting the spin-orbit-torque wiring, wherein the spin-orbit-torque wiring includes a convex portion which protrudes in the second direction in relation to a first surface on the side of the first ferromagnetic layer at a connecting part between the spin-orbit-torque wiring and the first ferromagnetic layer.
1. A spin-orbit-torque magnetization rotational element comprising:
a spin-orbit-torque wiring which extends in a first direction; and
a first ferromagnetic layer which is laminated in a second direction intersecting the spin-orbit-torque wiring, wherein:
the spin-orbit-torque wiring includes a convex portion which protrudes in the second direction in relation to a first surface at a connecting part between the spin-orbit-torque wiring and the first ferromagnetic layer, and
a spin is implanted to the first ferromagnetic layer from the spin-orbit-torque wiring.
2. The spin-orbit-torque magnetization rotational element according to claim 1 ,
wherein the convex portion configured to surround a periphery of the first ferromagnetic layer.
3. The spin-orbit-torque magnetization rotational element according to claim 1 ,
wherein a side surface of the convex portion on the side of the first ferromagnetic layer is inclined in a direction away from the first ferromagnetic layer from the first surface toward a tip of the convex portion.
4. The spin-orbit-torque magnetization rotational element according to claim 1 , further comprising:
an insertion layer which is provided at a surface of the spin-orbit-torque wiring, the surface being opposite to the side with the first ferromagnetic layer at a position where the convex portion of the spin-orbit-torque wiring is provided.
5. The spin-orbit-torque magnetization rotational element according to claim 1 ,
wherein the spin-orbit-torque wiring contains one or more elements selected from a group consisting of Ta, W, Pt, Au, Nb, Mo, Ru, Os, Rh, Ir, Pd, and Ag.
6. A spin-orbit-torque magnetoresistance effect element comprising:
the spin-orbit-torque magnetization rotational element according to claim 1 ;
a nonmagnetic layer which is laminated on a surface of the first ferromagnetic layer, the surface being opposite to a surface contacting the spin-orbit-torque wiring; and
a second ferromagnetic layer which sandwiches the first ferromagnetic layer and the nonmagnetic layer, wherein:
the first ferromagnetic layer, the nonmagnetic layer, and the second ferromagnetic layer constitute a functional unit configured to exhibit a magnetoresistance effect, and
an upper electrode for reading a change in resistance value of the functional unit is connected to the upper portion of the functional unit.
7. The spin-orbit-torque magnetoresistance effect element according to claim 6 ,
wherein a shortest distance between the convex portion and the functional unit is equal to or smaller than a height of the functional unit.
8. The spin-orbit-torque magnetoresistance effect element according to claim 6 ,
wherein a shortest distance between the convex portion and the functional unit is equal to or larger than a difference between a height of the functional unit and a height of the convex portion.
9. The spin-orbit-torque magnetoresistance effect element according to claim 6 ,
wherein a height of the convex portion is equal to or smaller than a height of the functional unit.
10. The spin-orbit-torque magnetoresistance effect element according to claim 6 , further comprising:
an interlayer insulating film configured to protect a side wall of the functional unit,
wherein the interlayer insulating film is an oxide or a nitride of one or more elements selected from a group consisting of Si, Al, Ta, Mg, and Hf.
11. A magnetic memory comprising:
a plurality of spin-orbit-torque magnetoresistance effect elements according to claim 6 .
12. A method of manufacturing the spin-orbit-torque magnetization rotational element according to claim 1 , the method comprising the steps of:
laminating a protection layer on a substrate and removing the protection layer excluding at least a position to be the convex portion;
sequentially laminating layers to be the spin-orbit-torque wiring and the ferromagnetic layer on the protection layer; and
forming a sacrificial layer on a part of the ferromagnetic layer and performing etching.
13. A method of manufacturing the spin-orbit-torque magnetization rotational element according to claim 1 , the method comprising the steps of:
sequentially laminating layers to be the spin-orbit-torque wiring and the ferromagnetic layer on a substrate;
forming a sacrificial layer coating portions to be the first ferromagnetic layer and the convex portion; and
performing etching thorough the sacrificial layer.
14. A method of manufacturing the spin-orbit-torque magnetization rotational element according to claim 1 , the method comprising the steps of:
sequentially laminating layers to be the spin-orbit-torque wiring and the ferromagnetic layer on a substrate;
forming a protection layer coating portions to be the first ferromagnetic layer, removing an unnecessary portion, and forming the first ferromagnetic layer;
forming a coating of an insulation layer coating the first ferromagnetic layer and the layer to be the spin-orbit-torque wiring; and
laminating a material, which is a same as a material of the layer to be the spin-orbit-torque wiring, and thickening the layer to be the spin-orbit-torque wiring.