IP Library Granted Patent US 10,756,263
Granted Patent B2
US 10,756,263 · App. 16/110,376 · Granted Aug 25, 2020

Phase transition based resistive random-access memory

Inventors: Joerg Appenzeller (West Lafayette, IN); Feng Zhang (West Lafayette, IN); Yuqi Zhu (West Lafayette, IN); Albert V. Davydov (North Potomac, MD); Sergiy Krylyuk (Montgomery Village, MD); Huairuo Zhang (Gaithersburg, MD); Leonid A. Bendersky (Montgomery Village, MD)
Assignee: Purdue Research Foundation
H01L45/06G11C13/0004G11C13/0038H01L45/1253H01L45/141H01L45/1608
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Quick Facts
Patent No.
US 10,756,263
App. No.
16/110,376
Granted
Aug 25, 2020
Kind
B2
Abstract

A method of switching a phase-change device (Device), including changing phase of the Device from a semiconducting 2H phase to a new 2H d phase with a higher conductivity, the Device having an active material with a thickness including a phase transition material to thereby transition the Device from a high resistive state (HRS) to a low resistive state (LRS) by application of a set voltage and further to return the Device from the LRS back to the HRS by application of a reset voltage.

Claims (26)

1. A method of switching a phase-change device, comprising:

changing phase of a phase-change device (Device) from a semiconducting 2H phase to a new 2H d phase with a higher conductivity, the Device having an active material with a thickness including a phase transition material to thereby transition the Device from a high resistive state (HRS) to a low resistive state (LRS) by application of a set voltage and further to return the Device from the LRS back to the HRS by application of a reset voltage,

wherein the active material is a phase-change material selected from the group consisting essentially of MoTe 2 , Mo 1−x W x Te 2 , GaTe, ReSe 2 , and ReS 2 , and

wherein x of W x can range from 0 to 0.09.

2. The method of claim 1 , wherein the change in phase of the Device is from the 2H unformed phase representing a pristine atomic disposition of the active material to the 2H d formed phase representing a realignment of atoms in the active material and the 2H phase by applying a forming voltage.

3. A method of switching a phase-change device, comprising:

changing phase of a phase-change device (Device) from a semiconducting 2H phase to a new 2H d phase with a higher conductivity, the Device having an active material with a thickness including a phase transition material to thereby transition the Device from a high resistive state (HRS) to a low resistive state (LRS) by application of a set voltage and further to return the Device from the LRS back to the HRS by application of a reset voltage,

wherein the active material is a phase-change material selected from the group consisting essentially of MoTe 2 , Mo 1−x W x Te 2 , GaTe, ReSe 2 , and ReS 2 , and

wherein when the active material is MoTe 2 the set voltage is between about 0.4 V and about 2.3 V for a thickness of between about 3 nm to about 40 nm.

4. The method of claim 3 , wherein the change in phase of the Device is from the 2H unformed phase representing a pristine atomic disposition of the active material to the 2H d formed phase representing a realignment of atoms in the active material and the 2H phase by applying a forming voltage.

5. A method of switching a phase-change device, comprising:

changing phase of a phase-change device (Device) from a semiconducting 2H phase to a new 2H d phase with a higher conductivity, the Device having an active material with a thickness including a phase transition material to thereby transition the Device from a high resistive state (HRS) to a low resistive state (LRS) by application of a set voltage and further to return the Device from the LRS back to the HRS by application of a reset voltage,

wherein the active material is a phase-change material selected from the group consisting essentially of MoTe 2 , Mo 1−x W x Te 2 , GaTe, ReSe 2 , and ReS 2 , and

wherein the Device further comprising:

a substrate;

a first electrode formed atop the substrate, wherein the active material is formed atop the first electrode;

an isolation layer atop the active material; and

a second electrode formed atop the isolation material,

the substrate is made from material selected form the group consisting of silicon, silicon dioxide, glass, sapphire, germanium, gallium arsenide, indium phosphate, alloys of silicon and germanium, titanium oxide, single polymer, such as polyethylene (PE), biaxially oriented polypropylene (BOPP), polyethylene terephthalate (PET), polyvinyl chloride (PVC), and combinations thereof,

the first and second electrodes are made from material selected from the group consisting essentially of aluminum, copper, gold, silver, polysilicon, molybdenum, nickel, indium tin oxide (ITO), graphene, carbon nanotubes (CNT), silver nanowires (AgNWs), conductive polymer, and combinations thereof,

the isolation is made of a material selected from the group consisting essentially of silicon dioxide (SiO 2 ), boron nitride (BN) or metal oxide material, such as aluminum oxide (Al 2 O 3 ), hafnium dioxide (HfO 2 ), or polymers, and combinations thereof,

the isolation layer includes a current path arrangement between the second electrode and the active material, and

the Device further comprising a tunneling barrier layer formed between the first electrode and the active material.

6. The method of claim 5 , the current path arrangement including a window.

7. The method of claim 5 , the current path arrangement includes a plurality of vias.

8. The method of claim 5 , wherein the tunneling barrier layer is made of material selected from the group consisting essentially of silicon dioxide (SiO 2 ), aluminum oxide (Al 2 O 3 ), hafnium dioxide (HfO 2 ), boron nitride (BN), other two-dimensional (2D) materials such as MoS 2 , WSe 2 , MoSe 2 , and a combination thereof.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 28, 2020
From: KRYLYUK, SERGIY; ZHANG, HUAIRUO
To: THEISS RESEARCH
Reel/Frame 053627/0594 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2020
From: DAVYDOV, ALBERT V.; BENDERSKY, LEONID A.
To: GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE
Reel/Frame 053260/0870 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 10, 2019
From: APPENZELLER, JOERG; ZHANG, FENG; ZHU, YUQI
To: PURDUE RESEARCH FOUNDATION
Reel/Frame 050327/0887 →
Continuity (2)
Continuation In Part 15987867 · May 23, 2018
Related Publication 20190363250A1 · Nov 28, 2019
Cited By (1)
US 12,382,846