Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head
An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba 1-x Ca x Ti 1-y Zr y O 3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.
1. An oriented piezoelectric film comprising a perovskite type crystal represented by general formula (1):
Ba 1-x Ca x Ti 1-y Zr y O 3 (0≤ x≤ 0.2, and 0≤ y≤ 0.2) (1),
wherein the oriented piezoelectric film is formed on a metallic electrode having a (111) orientation, and has the (111) orientation according to a pseudocubic crystal notation.
2. The oriented piezoelectric film according to claim 1 , wherein an abundance of the (111) orientation determined by a backscattered electron diffraction (EBSD) method is 50% or more on a surface of the oriented piezoelectric film, and in view of an inverse pole figure in a normal line direction of the oriented piezoelectric film, variation in angles of the (111) orientation is within 5 degrees.
3. The oriented piezoelectric film according to claim 1 , wherein the metallic electrode comprises at least one of platinum and gold.
4. A liquid dispensing head comprising:
a liquid dispensing hole;
a pressure chamber in communication with the liquid dispensing hole; and
an actuator for changing a volume of a liquid to dispense the liquid from the liquid dispensing hole to the pressure chamber,
wherein the actuator comprises:
a vibration plate, a lower electrode, the oriented piezoelectric film according to claim 1 , wherein the lower electrode is the metallic electrode, and an upper electrode, which are sequentially disposed with respect to a pressure chamber side of the actuator.