Memory device
View Patent ↗The present invention provides a memory device in which a lower electrode, a seed layer, synthetic antiferromagnetic layers, a separation layer, a magnetic tunnel junction, a capping layer, and an upper electrode are formed on a substrate in a laminated manner, wherein a diffusion barrier is formed between the magnetic tunnel junction and the capping layer. In addition, the present invention provides a memory device in which a lower electrode, a seed layer, synthetic antiferromagnetic layers, a separation layer, a magnetic tunnel junction, a capping layer, and an upper electrode are formed on a substrate in a laminated manner, wherein the seed layer is formed of a material that allows the synthetic antiferromagnetic layers to grow in the FCC (111) direction.
1. A memory device, comprising:
two electrodes;
a seed layer, synthetic antiferromagnetic layer, separation layer, magnetic tunnel junction, and capping layer laminated between the two electrodes; and
a buffer layer formed between the synthetic antiferromagnetic layer and the separation layer,
wherein the synthetic antiferromagnetic layer comprises one magnetic layer and one nonmagnetic layer, and
wherein the magnetic layer is formed to have a structure in which a magnetic metal and a nonmagnetic metal are repeatedly laminated a plurality of times.
2. The memory device according to claim 1 , wherein the magnetic tunnel junction is formed on the synthetic antiferromagnetic layer.
3. The memory device according to claim 1 , wherein
wherein a thickness of the buffer layer is less than a thickness of the magnetic layer of the synthetic antiferromagnetic layer.
4. The memory device according to claim 1 , further comprising an oxide layer formed between the magnetic tunnel junction and the capping layer.
5. The memory device according to claim 1 , wherein the magnetic tunnel junction comprises a pinned layer, a tunnel barrier, and a free layer,
wherein the free layer comprises a first free layer, a second free layer, and an insertion layer formed between the first and second free layers.
6. The memory device according to claim 5 , wherein the first and second free layers are each formed of a material comprising CoFeB,
wherein a thickness of the first free layer is less than or equal to a thickness of the second free layer.
7. The memory device according to claim 1 , wherein the separation layer is formed of a material having a body-centered cubic (BCC) structure.
8. The memory device according to claim 7 , wherein the separation layer is formed to have a thickness of 0.1 nm to 0.5 nm.