Device for making carbon nanotube arrays
View Patent ↗A device for making a carbon nanotube array includes a chamber, a gas diffusing unit, and a gas transporting pipe. The chamber defines a first inlet and a second inlet spaced apart from each other. The gas diffusing unit is in the chamber, and the gas diffusing unit is a hollow structure and defines a space, a first through hole, and an outlet. The gas transporting pipe has a first end and a second end opposite to the first end. The first end extends out of the chamber from the second inlet, and the second end is in the chamber and connected to the first through hole. The present application also relates to a method for making the carbon nanotube array.
1. A device for making a carbon nanotube array, the device comprising:
a chamber defining a first inlet and a second inlet spaced apart from each other;
a gas diffusing unit in the chamber, wherein the gas diffusing unit is a hollow structure and defines a space, a first through hole, and an outlet; and the gas diffusing unit comprises a first sidewall and a second sidewall opposite to the first sidewall, each of the first sidewall and the second sidewall has a plurality of steps, and the plurality of steps is inside of the space; and
a gas transporting pipe having a first end and a second end opposite to the first end, wherein the gas transporting pipe extends out of the chamber through the second inlet, and the second end is in the chamber and connected to the first through hole.
2. The device of claim 1 , wherein the gas diffusing unit comprises a bottom wall and a sidewall, the sidewall defines the first through hole, and the outlet is opposite to the bottom wall.
3. The device of claim 2 , wherein the sidewall forms a cube, a circle, or a trapezoid.
4. The device of claim 2 , wherein the sidewall is used to support a growth substrate having a second through holes, and the growth substrate covers the outlet.
5. The device of claim 1 , wherein the second end is inserted into the first through hole.
6. The device of claim 1 , wherein a shape of the gas diffusing unit is cubic.
7. The device of claim 1 , wherein the gas diffusing unit is a semi-closed container integrated with the gas transporting pipe.
8. The device of claim 1 , wherein the gas transporting pipe is a quartz tube, and the gas diffusing unit is a quartz boat.
9. The device of claim 1 , wherein the gas diffusing unit further comprises a plate covering the outlet, and the plate defines a plurality of third through holes spaced apart from each other.
10. The device of claim 9 , wherein the plate is a quartz sheet or a metal mesh.
11. The device of claim 9 , wherein the plate supports a growth substrate having a plurality of second through holes, and the plurality of third through holes corresponds to the plurality of second through holes one to one.
12. A device for making a carbon nanotube array, the device comprising:
a chamber defining a first inlet and a second inlet spaced apart from each other;
a gas diffusing unit in the chamber, wherein the gas diffusing unit is a hollow structure and defines a space, a first through hole, and an outlet;
a growth substrate located on and covering the outlet, wherein the growth substrate has a plurality of second through holes; and
a gas transporting pipe having a first end and a second end opposite to the first end, wherein the gas transporting pipe extends out of the chamber through the second inlet, and the second end is in the chamber and connected to the first through hole.
13. The device of claim 12 , wherein the growth substrate has a first surface and a second surface opposite to the first surface, a carbon nanotube array is located on the first surface, and the second surface is in direct contact with the outlet.
14. The device of claim 13 , wherein the plurality of second through holes extends from the first surface to the second surface.
15. The device of claim 13 , wherein the first surface and the second surface cover the outlet.
16. The device of claim 12 , wherein the gas diffusing unit comprises a first sidewall and a second sidewall opposite to the first sidewall, each of the first sidewall and the second sidewall has a plurality of steps, and the plurality of steps is inside of the space.