IP Library › Granted Patent US 10,788,593
Granted Patent B2
US 10,788,593 · App. 16/169,893 · Granted Sep 29, 2020

Systems with multiple layers of semiconductor x-ray detectors

Inventors: Peiyan Cao (Shenzhen, CN); Yurun Liu (Shenzhen, CN)
Assignee: SHENZHEN XPECTVISION TECHNOLOGY CO., LTD.
G01T1/242G01T1/241G01T1/243H01L27/14634H01L27/14676
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Quick Facts
Patent No.
US 10,788,593
App. No.
16/169,893
Granted
Sep 29, 2020
Kind
B2
Abstract

Disclosed herein is a system comprising multiple layers of X-ray detectors. The top layer may have through-wafer vias. The other layers may have bonding wires. The bonding wires are shadowed by the X-ray absorption layers in the layers above.

Claims (45)

1. A system comprising:

a first X-ray detector in a first layer;

a second X-ray detector in a second layer;

wherein the first X-ray detector comprises a first X-ray absorption layer and a first electronics layer;

wherein the second X-ray detector comprises a second X-ray absorption layer and a second electronics layer;

wherein the first electronics layer comprises vias extending from a first surface of the first electronics layer to a second surface of the first electronics layer;

wherein the first X-ray detector is mounted to a first surface of a first printed circuit board;

where an electrical connection between the first electronics layer and the first printed circuit board is through the vias;

wherein the second X-ray detector is mounted to a first surface of a second printed circuit board, or to a second surface of the first printed circuit board opposite to the first surface of the first printed circuit board;

wherein an electrical connection between the second electronics layer and the second printed circuit board or the first printed circuit board is through a second plurality of bonding wires;

wherein the second plurality of bonding wires or gaps in the second X-ray absorption layer are shadowed by the first X-ray absorption layer.

2. The system of claim 1 , further comprising a first interposer, wherein the first X-ray detector is mounted to the first printed circuit board through the first interposer.

3. The system of claim 1 , further comprising a second interposer, wherein the second X-ray detector is mounted to the first surface of the second printed circuit board, or to the second surface of the first printed circuit board, through the second interposer.

4. The system of claim 1 , further comprising a third X-ray detector in a third layer, wherein the third X-ray detector comprises a third X-ray absorption layer and a third electronics layer.

5. The system of claim 4 , wherein the second X-ray detector is mounted to the second surface of the first printed circuit board and the third X-ray detector is mounted to the first surface of the second printed circuit board.

6. The system of claim 5 , wherein an electrical connection between the third electronics layer and the second printed circuit board is through a third plurality of bonding wires, wherein the third plurality of bonding wires or gaps in the third X-ray absorption layer are shadowed by the first X-ray absorption layer or the second X-ray absorption layer.

7. The system of claim 5 , further comprising a third interposer, wherein the third X-ray detector is mounted to the first surface of the second printed circuit board through the third interposer.

8. The system of claim 4 , wherein the second X-ray detector is mounted to the first surface of the second printed circuit board and the third X-ray detector is mounted to a second surface of the second printed circuit board opposite to the first surface of the second printed circuit board.

9. The system of claim 8 , wherein an electrical connection between the third electronics layer and the second printed circuit board is through a third plurality of bonding wires, wherein the third plurality of bonding wires or gaps in the third X-ray absorption layer are shadowed by the first X-ray absorption layer or the second X-ray absorption layer.

10. The system of claim 8 , further comprising a third interposer, wherein the third X-ray detector is mounted to the second surface of the second printed circuit board through the third interposer.

11. The system of claim 4 , wherein the third X-ray absorption layer comprises a plurality of chips or the third electronics layer comprises a plurality of chips.

12. The system of claim 4 , wherein the second X-ray absorption layer comprises a plurality of chips, each of which comprises at least one edge shadowed by the first X-ray absorption layer.

13. The system of claim 12 , wherein the chips of the second X-ray detector are arranged in different orientations.

14. The system of claim 12 , wherein the chips of the second X-ray detector are arranged in a same orientation.

15. The system of claim 4 , wherein the third X-ray absorption layer comprises a plurality of chips, each of which comprises at least one edge shadowed by the first X-ray absorption layer or the second X-ray absorption layer.

16. The system of claim 10 , wherein the chips of the third X-ray detector are arranged in different orientations.

17. The system of claim 10 , wherein the chips of the third X-ray detector are arranged in a same orientation.

18. The system of claim 1 , wherein the first X-ray absorption layer comprises a plurality of chips or the first electronics layer comprises a plurality of chips.

19. The system of claim 1 , wherein the second X-ray absorption layer comprises a plurality of chips or the second electronics layer comprises a plurality of chips.

20. The system of claim 1 , wherein the first X-ray absorption layer comprises an electrode; wherein the first electronics layer comprises an electronic system; wherein the electronic system comprises:

a first voltage comparator configured to compare a voltage of the electrode to a first threshold;

a second voltage comparator configured to compare the voltage to a second threshold;

a counter configured to register a number of X-ray photons reaching the first X-ray absorption layer;

a controller;

wherein the controller is configured to start a time delay from a time at which the first voltage comparator determines that an absolute value of the voltage equals or exceeds an absolute value of the first threshold;

wherein the controller is configured to activate the second voltage comparator during the time delay;

wherein the controller is configured to cause the number registered by the counter to increase by one, if the second voltage comparator determines that an absolute value of the voltage equals or exceeds an absolute value of the second threshold.

21. The system of claim 20 , wherein the electronic system further comprises a capacitor module electrically connected to the electrode, wherein the capacitor module is configured to collect charge carriers from the electrode.

22. The system of claim 20 , wherein the controller is configured to activate the second voltage comparator at a beginning or expiration of the time delay.

23. The system of claim 20 , wherein the electronic system further comprises a voltmeter, wherein the controller is configured to cause the voltmeter to measure the voltage upon expiration of the time delay.

24. The system of claim 23 , wherein the controller is configured to determine an X-ray photon energy based on a value of the voltage measured upon expiration of the time delay.

25. The system of claim 20 , wherein the controller is configured to connect the electrode to an electrical ground.

26. The system of claim 20 , wherein a rate of change of the voltage is substantially zero at expiration of the time delay.

27. The system of claim 20 , wherein a rate of change of the voltage is substantially non-zero at expiration of the time delay.

28. The system of claim 1 , wherein the first X-ray absorption layer comprises a diode.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 24, 2018
From: CAO, PEIYAN; LIU, YURUN
To: SHENZHEN XPECTVISION TECHNOLOGY CO., LTD.
Reel/Frame 047303/0172 →
Continuity (2)
Continuation PCTCN2016099806 · Sep 23, 2016
Related Publication 20190064372A1 · Feb 28, 2019