Thermopile infrared individual sensor for measuring temperature or detecting gas
The invention relates to a thermopile infrared individual sensor in a housing that is filled with a gaseous medium having optics and one or more sensor chips with individual sensor cells with infrared sensor structures with reticulated membranes, the infrared-sensitive regions of which are spanned by, in each case, at least one beam over a cavity in a carrier body with good thermal conduction. The object of the invention consists of specifying a thermopile infrared sensor using monolithic Si-micromechanics technology for contactless temperature measurements, which, in the case of a sufficiently large receiver surface, outputs a high signal with a high response speed and which can operated in a gaseous medium with normal pressure or reduced pressure and which is producible in mass produced numbers without complicated technology for sealing the housing. This is achieved by virtue of, in each case, combining a plurality of individual adjacent sensor cells ( 18 ) with respectively one infrared-sensitive region with thermopile structures ( 14, 15 ) on the membrane ( 12 ) on a common carrier body ( 1 ) of an individual chip to a single thermopile sensor structure with a signal output in the housing, consisting of a cap ( 12 ) sealed with a base plate ( 3 ) with a common gaseous medium ( 10 ).
1. A thermopile infrared sensor, comprising:
a housing filled with a gas medium, the housing having
a base plate and
a cap;
an optical unit arranged at an aperture opening in the housing;
a sensor chips having a plurality of sensor cells, each of the plurality of sensor cells having
an infrared-sensitive region with thermopile structures arranged on a membrane spanned by beams over a cavity,
the plurality of sensor cells being combined on a common carrier body to form
a thermopile sensor structure; and
a terminal extending through the base plate of the housing,
wherein signals of the plurality of sensor cells are combined by a series circuit, a parallel circuit, or a combination of a series and a parallel circuit to form an output signal, and
wherein the output signal is directly led out via the terminal.
2. The thermopile infrared sensor as claimed in claim 1 , wherein the cavity under each membrane has vertical or nearly vertical walls, which are driven in from a wafer rear side.
3. The thermopile infrared sensor as claimed in claim 1 , wherein the cavity under each membrane has inclined walls, which are etched out from a front side through slots in the membrane.
4. The thermopile infrared sensor as claimed in claim 1 , wherein the gas medium is a gas having significantly higher molar mass than air under normal atmospheric pressure.
5. The thermopile infrared sensor as claimed in claim 4 , wherein the gas medium is a gas or gas mixture having a pressure which is significantly lower than normal atmospheric pressure.
6. The thermopile infrared sensor as claimed in claim 1 , wherein the thermopile structures consist of n-conductive and p-conductive polysilicon applied in a CMOS process, amorphous silicon, germanium, or a mixed form of silicon and germanium, or of thermoelectric thin metal layers made of bismuth or antimony.
7. The thermopile infrared sensor as claimed in claim 1 , wherein the gas medium is xenon, krypton, or argon.
8. The thermopile infrared sensor as claimed in claim 1 , wherein the output signal is directly led out via the terminal through a wire bridge which connects the terminal to a bond pad on the common carrier body.
9. The thermopile infrared sensor as claimed in claim 1 , further comprising:
a second sensor structure formed by a second plurality of sensor cells;
a partition wall arranged between the sensor structure and the second sensor structure;
a first optical filter arranged on a first side of the partition wall and associated with the sensor structure; and
a second optical filter arranged on a second side of the partitional wall and associated with the second sensor structure,
wherein the output signal forms a first sensor channel and a second output of the second sensor structure forms a second sensor channel.
10. An NDIR gas detector comprising the thermopile infrared sensor as claimed in claim 9 .