Solid-state imaging device, imaging apparatus, and method of manufacturing solid-state imaging device
A solid-state imaging device including a semiconductor substrate on which a plurality of photoelectric conversion devices are arranged in an imaging device region in a two-dimensional array and a stacked body formed by stacking a plurality of layers on the semiconductor substrate. The stacked body includes an in-layer lens layer that has in-layer lenses each provided at a position corresponding to each of the photoelectric conversion devices. The solid-state imaging device further includes a planarization layer that is stacked on the in-layer lens layer and an on-chip lens layer that is an upper layer than the planarization layer and that has on-chip lenses each provided at a position corresponding to each of the photoelectric conversion devices. The in-layer lens layer has a plurality of structures at a height equal to a height of the in-layer lenses, the plurality of structures being provided on an outside of the imaging device region.
1. A solid-state imaging device, comprising:
an imaging device region;
a semiconductor substrate;
a plurality of photoelectric conversion devices in the imaging device region in a two-dimensional array, wherein the plurality of photoelectric conversion devices is on the semiconductor substrate; and
a stacked body that comprises a plurality of layers on a surface of the semiconductor substrate, wherein
the plurality of layers includes:
an in-layer lens layer that includes a plurality of in-layer lenses, wherein
each of the plurality of in-layer lenses is at a first height with respect to the surface of the semiconductor substrate, and
each of the plurality of in-layer lenses is at a first position corresponding to each of the plurality of photoelectric conversion devices;
a planarization layer on the in-layer lens layer, wherein the planarization layer has a planarized surface; and
an on-chip lens layer on the planarization layer,
the on-chip lens layer comprises a plurality of on-chip lenses,
each of the plurality of on-chip lenses is at a second position corresponding to each of the plurality of photoelectric conversion devices,
the in-layer lens layer further includes a plurality of structures at a second height with respect to the surface of the semiconductor substrate,
the second height of the plurality of structures is equal to the first height of the plurality of in-layer lenses,
the plurality of structures is outside of the imaging device region, and
a plurality of pitches of the plurality of structures changes in at least one of a transverse direction or a vertical direction.
2. The solid-state imaging device according to claim 1 , further comprising a peripheral circuit region and a scribe region, wherein
each of the peripheral circuit region and the scribe region comprises the plurality of structures, and
the peripheral circuit region and the scribe region are outside of the imaging device region.
3. The solid-state imaging device according to claim 1 , wherein
the plurality of layers further includes a lower layer below the in-layer lens layer,
the lower layer comprises a site with a positioning mark, and
the plurality of structures is absent in the site.
4. The solid-state imaging device according to claim 1 , wherein the plurality of structures is at positions at which cross-sections of the plurality of structures do not appear on a scribed section of the solid-state imaging device.
5. The solid-state imaging device according to claim 1 , wherein a shape of a structure of the plurality of structures is identical to a shape of an in-layer lens of the plurality of in-layer lenses.
6. The solid-state imaging device according to claim 1 , wherein a shape of a structure of the plurality of structures is different from a shape of an in-layer lens of the plurality of in-layer lenses.
7. The solid-state imaging device according to claim 1 , wherein the plurality of pitches of the plurality of structures is equivalent to a plurality of pitches of the plurality of in-layer lenses.
8. The solid-state imaging device according to claim 1 , wherein the plurality of pitches of the plurality of structures is different from a plurality of pitches of the plurality of in-layer lenses.
9. An imaging apparatus, comprising:
a solid-state imaging device; and
a signal processing circuit configured to process a signal from the solid-state imaging device, wherein
the solid-state imaging device includes:
an imaging device region;
a semiconductor substrate;
a plurality of photoelectric conversion devices in the imaging device region in a two-dimensional array, wherein the plurality of photoelectric conversion devices is on the semiconductor substrate; and
a stacked body that comprises a plurality of layers on a surface of the semiconductor substrate,
the plurality of layers includes:
an in-layer lens layer that includes a plurality of in-layer lenses, wherein
each of the plurality of in-layer lenses is at a first height with respect to the surface of the semiconductor substrate, and
each of the plurality of in-layer lenses is at a first position corresponding to each of the plurality of photoelectric conversion devices;
a planarization layer on the in-layer lens layer, wherein the planarization layer has a planarized surface; and
an on-chip lens layer on the planarization layer,
the on-chip lens layer comprises a plurality of on-chip lenses,
each of the plurality of on-chip lenses is at a second position corresponding to each of the plurality of photoelectric conversion devices,
the in-layer lens layer further includes a plurality of structures at a second height with respect to the surface of the semiconductor substrate,
the second height of the plurality of structures is equal to the first height of the plurality of in-layer lenses,
the plurality of structures is outside of the imaging device region, and
a plurality of pitches of the plurality of structures changes in at least one of a transverse direction or a vertical direction.
10. A method of manufacturing a solid-state imaging device, comprising:
forming a plurality of photoelectric conversion devices in an imaging device region of a semiconductor substrate in a two-dimensional array; and
forming a stacked body that comprises a plurality of layers on a surface of the semiconductor substrate, wherein
the formation of the stacked body includes:
forming an in-layer lens layer that includes a plurality of in-layer lenses, wherein
each of the plurality of in-layer lenses is at a first height with respect to the surface of the semiconductor substrate, and
each of the plurality of in-layer lenses is at a first position corresponding to each of the plurality of photoelectric conversion devices;
forming a planarization layer having a planarized surface on the in-layer lens layer; and
forming an on-chip lens layer on the planarization layer,
the on-chip lens layer comprises a plurality of on-chip lenses,
each of the plurality of on-chip lenses is at a second position corresponding to each of the plurality of photoelectric conversion devices,
the in-layer lens layer further includes a plurality of structures at a second height with respect to the surface of the semiconductor substrate,
the second height of the plurality of structures is equal to the first height of the plurality of in-layer lenses,
the plurality of structures is formed outside of the imaging device region, and
a plurality of pitches of the plurality of structures changes in at least one of a transverse direction or a vertical direction.