Fan-out semiconductor package
A fan-out semiconductor package includes: a first interconnection member having a through-hole; a semiconductor chip disposed in the through-hole and having an active surface and an inactive surface; an encapsulant encapsulating at least portions of the first interconnection member and the inactive surface of the semiconductor chip; a second interconnection member disposed on the first interconnection member and the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads of the semiconductor chip; a passivation layer disposed on the second interconnection member; and an under-bump metal layer including an external connection pad formed on the passivation layer and a plurality of vias connecting the external connection pad and the redistribution layer of the second interconnection member to each other, wherein the first interconnection member includes a redistribution layer electrically connected to the connection pads of the semiconductor chip.
1. A semiconductor package comprising:
a semiconductor chip having an active surface having connection pads and a first passivation layer directly disposed thereon and an inactive surface opposing the active surface, the first passivation layer exposing a portion of the connection pads;
an encapsulant encapsulating at least portions of the inactive surface of the semiconductor chip;
an interconnection member disposed on the active surface of the semiconductor chip and including a redistribution layer electrically connected to the connection pads of the semiconductor chip and a first insulating layer;
a second passivation layer disposed on the interconnection member opposite to the active surface of the semiconductor chip;
an under-bump metal layer including a connection pad formed on the second passivation layer, and vias penetrating the second passivation layer and connecting the connection pad of the under-bump metal layer and a pattern of the redistribution layer of the interconnection member to each other; and
a connection terminal disposed on the connection pad of the under-bump metal layer and connected to the vias through the connection pad of the under-bump metal layer,
wherein the connection pad of the under-bump metal layer includes a plurality of dimples corresponding to the vias,
each of the vias has a substantially circular shape in a plane cutting the vias, and
the connection pad is connected to the pattern of the redistribution layer through only the vias having a constant distance between any two immediately adjacent vias thereof in a first direction and having a constant distance between any two immediately adjacent vias thereof in a second direction perpendicular to the first direction.
2. The semiconductor package of claim 1 , further comprising an insulating member having a through-hole,
wherein the semiconductor chip is disposed in the through-hole of the insulating member.
3. The semiconductor package of claim 2 , wherein the insulating member includes a second insulating layer,
a first redistribution layer is disposed on a first surface of the second insulating layer,
a second redistribution layer is disposed on a second surface of the second insulating layer opposing the first surface of the second insulating layer, and
the first and second redistribution layers are electrically connected to the connection pads of the semiconductor chip.
4. The semiconductor package of claim 1 , wherein a surface of the connection pad of the under-bump metal layer between adjacent dimples is a curved surface.
5. The semiconductor package of claim 1 , wherein the second passivation layer has an upper surface facing the interconnection member and a lower surface opposing the upper surface of the second passivation layer, and
the plurality of dimples are recessed toward the interconnection member and are spaced apart from a level of the lower surface of the second passivation layer.
6. The semiconductor package of claim 1 , wherein in a cross section taken along a stacking direction along which the semiconductor chip and the interconnection member are stacked, each of the plurality of dimples corresponds to a portion of a round shape.
7. The semiconductor package of claim 1 , wherein a thickness of a portion of the connection pad without the plurality of dimples is greater than a depth of each of the plurality of dimples formed therein.