Semiconductor devices
A semiconductor device includes a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, in which each of the plurality of conductive structures extends in the first direction. A plurality of contact structures are arranged between the conductive structures in an alternating arrangement and spaced apart from each other in the first direction. A plurality of insulation structures are arranged in a space between the conductive structures and between the contact structures. A plurality of air spacers are arranged between the alternating arrangement of the plurality of conductive structures and the plurality of contact structures, respectively and spaced apart from each other in the first direction.
1. A semiconductor device, comprising
a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, each of the plurality of conductive structures extending in the first direction;
a plurality of contact structures arranged between the conductive structures in an alternating arrangement and spaced apart from each other in the first direction;
a plurality of insulation structures, each one of the insulation structures arranged in a space between the alternating arrangement of the conductive structures and the contact structures;
spacers arranged between the alternating arrangement of the conductive structures and the contact structures, respectively and the spacers are spaced apart from each other in the first direction; and
each of the plurality of insulation structures includes an air gap disposed therein,
wherein each air gap is completely surrounded by a respective insulation structure of the plurality of insulation structures,
wherein the spacers comprise air spacers
wherein the air spacers are arranged in pairs on opposite sidewalls of the conductive structures, respectively.
2. The semiconductor device of claim 1 , wherein the spacers are filled with an insulating material including at least one of silicon nitride and silicon oxide.
3. The semiconductor device of claim 1 , wherein an upper surface of each of the plurality of contact structures is positioned lower than an upper surface of each of the conductive structures, and is positioned higher than an upper surface of the air spacers.
4. The semiconductor device of claim 1 , wherein an upper width in the second direction of each of the plurality of contact structures is greater than a lower width in the second direction of the contact structures.
5. The semiconductor device of claim 1 , wherein an upper surface of de plurality of contact structures is positioned lower than an upper surface of the air spacers.
6. The semiconductor device of claim 1 , wherein each of the plurality of the conductive structures comprises a conductive pattern and a first mask pattern stacked on each other.
7. The semiconductor device of claim 6 , wherein each of the plurality of the conductive structures further comprises a second mask pattern on an upper sidewall of the first mask pattern, and the second mask pattern has a width less than a width in the second direction of the air spacers.
8. The semiconductor device of claim 7 , wherein a lower width in the second direction of the second mask pattern is greater than an upper width in the second direction of the second mask pattern.
9. The semiconductor device of claim 1 , wherein the contact structures are arranged side-by-side in the second direction.
10. The semiconductor device of claim 1 , wherein the space between die conductive structures and between the contact structures has a lower portion having a first width in the second direction, a middle portion having a second width greater than the first width and an upper portion having a third width less than the second width.
11. The semiconductor device of claim 1 , wherein the air spacers comprise first air spacers arranged between the alternating arrangement of the conductive structures and the contact structures, and further comprising second air spacers arranged between the plurality of conductive structures and the plurality of insulation structures.
12. A semiconductor device, comprising:
a plurality of conductive structures arranged on a substrate and spaced apart from each other in a second direction substantially perpendicular to a first direction, each of the plurality of conductive structures extending in the first direction, each of the plurality of the conductive structures including a conductive pattern and a first mask pattern stacked on each other;
a plurality of contact structures arranged between the conductive structures in an alternating arrangement to contact a surface of the substrate and the plurality of contact structures spaced apart from each other in the first direction;
a plurality of insulation structures, each cone of the insulation structures arranged in a space between the alternating arrangement of the plurality of conductive structures and the plurality of contact structures, each of the plurality of insulation structures including an air gap therein; and
air spacers arranged between a lower portion of the plurality of conductive structures and the plurality of contact structures, respectively;
wherein each air gap is completely surrounded by a respective insulation structure of the plurality of insulation structures,
wherein the air spacers and the air gaps face a conductive pattern of the conductive structure, and
wherein each air gap of the plurality of insulation structures are provided to face both sides of the contact structures in the first direction respectively the air spacers are provided to face both sides of each of the plurality of contact structures in the second direction respectively, and the air spacers and each of the air gaps facing a sidewall of the plurality of contact structures are spaced apart from each other.
13. The semiconductor device of claim 12 , wherein an upper surface of the plurality of contact structures is positioned lower than an upper surface of the plurality of conductive structures, respectively.
14. The semiconductor device of claim 12 , wherein an upper width in the second direction of each of the plurality of contact structures is greater than a lower width in the second direction of each of the plurality of contact structures.
15. The semiconductor device of claim 12 , wherein an upper surface of each of the plurality of the contact structures is positioned higher than an upper surface of the air spacers.
16. The semiconductor device of claim 15 , wherein each of the plurality of the conductive structures further comprises a second mask pattern on an upper sidewall of the first mask pattern, and the second mask pattern has a width less than a width in the second direction of the air spacers.
17. The semiconductor device of claim 16 , wherein a lower width in the second direction of the second mask pattern is greater than an upper width in the second direction of the second mask pattern.