Joint manufacturing method
Provided is a joint manufacturing method including: a step A of preparing a laminate in which two objects to be joined are temporarily adhered with a heat-joining sheet including a pre-sintering layer interposed between the two objects to be joined; a step B of increasing a temperature of the laminate from a temperature equal to or lower than a first temperature defined below to a second temperature; and a step C of holding the temperature of the laminate in a predetermined range after the step B, in which the laminate is pressurized during at least a part of the step B and at least a part of the step C. The first temperature is a temperature at which an organic component contained in the pre-sintering layer is decreased by 10% by weight when the pre-sintering layer is subjected to thermogravimetric measurement.
1. A joint manufacturing method comprising:
a step A of preparing a laminate in which two objects to be joined are temporarily adhered with a heat-joining sheet including a pre-sintering layer interposed between the two objects to be joined;
a step B of increasing a temperature of the laminate from a temperature equal to or lower than a first temperature defined below to a second temperature; and
a step C of holding the temperature of the laminate in a predetermined range after the step B,
wherein
the laminate is pressurized during at least a part of the step B and during at least a part of the step C:
the first temperature is a temperature at which an organic component contained in the pre-sintering layer is decreased by 10% by weight when the pre-sintering layer is subjected to thermogravimetric measurement; and
when the step B and the step C are performed in air, the thermogravimetric measurement is performed in the air, and when the step B and the step C are performed in a nitrogen atmosphere, a reducing gas atmosphere or a vacuum atmosphere, the thermogravimetric measurement is performed in the nitrogen atmosphere.
2. The joint manufacturing method according to claim 1 , wherein the laminate is pressurized at 5 to 40 MPa.
3. The joint manufacturing method according to claim 1 , wherein the temperature held in the step C is in a range of 200° C. to 400° C.
4. The joint manufacturing method according to claim 1 , wherein the laminate is pressurized by a flip chip bonder or a parallel plate press.