Polishing composition and method for polishing magnetic disk substrate
Embodiments provide a polishing composition containing colloidal silica, pulverized wet-process silica particles, and a water-soluble polymer compound. According to at leaset one embodiment, the water-soluble polymer compound is a copolymer containing a structural unit derived from an unsaturated aliphatic carboxylic acid and a structural unit derived from an unsaturated amide.
1. A polishing composition comprising:
colloidal silica;
pulverized wet-process silica particles; and
a water-soluble polymer compound,
wherein the water-soluble polymer compound is a copolymer containing a structural unit derived from an unsaturated aliphatic carboxylic acid and a structural unit derived from an unsaturated amide,
wherein the composition is an aqueous composition further comprising an acid and an oxidizing agent and having a pH value of 0.1 to 4.0, and
wherein the composition is used for polishing an electroless nickel-phosphorous plated aluminum magnetic disk substrate.
2. The polishing composition according to claim 1 , wherein the colloidal silica has an average particle size of 5 to 200 nm, and the pulverized wet-process silica particles have an average particle size of 0.1 to 1.0 μm.
3. The polishing composition according to claim 1 , wherein a value of a ratio of the average particle size of the pulverized wet-process silica particles with respect to the average particle size of the colloidal silica is 2.0 to 30.0.
4. The polishing composition according to claim 1 , wherein a total concentration of the colloidal silica and the pulverized wet-process silica particles is 1 to 50% by mass, and a ratio of the colloidal silica is 5 to 95% by mass and a ratio of the pulverized wet-process silica particles is 5 to 95% by mass with respect to a total mass of the colloidal silica and the pulverized wet-process silica particles.
5. The polishing composition according to claim 1 , wherein the water- soluble polymer compound is a copolymer having a molar ratio of 95:5 to 5:95 between the structural unit derived from an unsaturated aliphatic carboxylic acid and the structural unit derived from an unsaturated amide.
6. The polishing composition according to claim 1 , wherein the copolymer is formed of a combination of acrylic acid and/or a salt thereof and N-alkylacrylamide, a combination of acrylic acid and/or a salt thereof and N-alkylmethacrylamide, a combination of methacrylic acid and/or a salt thereof and N-alkylacrylamide, or a combination of methacrylic acid and/or a salt thereof and N-alkylmethacrylamide.
7. The polishing composition according to claim 1 , wherein the water-soluble polymer compound has a weight average molecular weight of 3000 to 1,000,000.
8. The polishing composition according to claim 1 , wherein the water-soluble polymer compound has a content of 0.0001 to 1.0% by mass.