Image sensor and methods of fabricating and measuring image sensor
A method of measuring an image sensor is disclosed. The method includes connecting a measurement unit to an image sensor, producing an electric current, which sequentially flows through a second connection line, second lower electrodes, an upper electrode, first lower electrodes, and a first connection line of the image sensor, using the measurement unit, and measuring an alignment state of the lower electrodes, the photoelectric conversion layer, and the upper electrode.
1. A method comprising:
connecting a measurement unit to an image sensor, the image sensor comprising a substrate, first lower electrodes on the substrate, second lower electrodes on the substrate, a photoelectric conversion layer covering at least a portion of the second lower electrodes, an upper electrode covering the photoelectric conversion layer and at least a portion of the first and second lower electrodes, a first connection line connected to the first lower electrodes, and a second connection line connected to the second lower electrodes;
producing an electric current, which flows through the second connection line, the second lower electrodes, the upper electrode, the first lower electrodes, and the first connection line, using the measurement unit; and
measuring an alignment state of the lower electrodes, the photoelectric conversion layer, and the upper electrode.
2. The method of claim 1 , wherein the measuring of the alignment state comprises measuring a number of the second lower electrodes in contact with the upper electrode.
3. The method of claim 1 , wherein the measuring of the alignment state comprises measuring an amount of the electric current that flows through the second connection line, the second lower electrodes, the upper electrode, the first lower electrodes, and the first connection line.
4. The method of claim 1 , wherein the measuring of the alignment state comprises:
measuring a number of the first lower electrodes in contact with the upper electrode; and
measuring a number of the second lower electrodes in contact with the upper electrode.
5. The method of claim 1 , wherein the image sensor further comprises:
a first pad contact plug, which penetrates the substrate and is connected to the first connection line; and
a second pad contact plug, which penetrates the substrate and is connected to the second connection line.
6. The method of claim 1 , wherein the image sensor further comprises an active region, a dummy region surrounding the active region, and a peripheral region surrounding the dummy region,
the first connection line is connected to the first lower electrodes in the dummy region, and
the second connection line is connected to the second lower electrodes in the dummy region.
7. The method of claim 6 , wherein the image sensor further comprises:
a first pad connected to the first connection line; and
a second pad connected to the second connection line, and
the first pad and the second pad are disposed in the peripheral region.
8. A method comprising:
connecting a measurement unit to an image sensor, the image sensor comprising a substrate, first lower electrodes on the substrate, second lower electrodes on the substrate, a photoelectric conversion layer covering at least a portion of the second lower electrodes, and an upper electrode covering the photoelectric conversion layer and at least a portion of the first and second lower electrodes,
producing an electric current, which flows through the second lower electrodes, the upper electrode, and the first lower electrodes, using the measurement unit; and
measuring a number of the second lower electrodes in contact with the upper electrode.
9. The method of claim 8 , further comprising measuring an alignment state of the first and second lower electrodes, the photoelectric conversion layer, and the upper electrode, using measurement information on the number of the second lower electrodes in contact with the upper electrode.
10. The method of claim 8 , wherein the image sensor further comprises:
a first connection line connected to the first lower electrodes; and
a second connection line connected to the second lower electrodes.
11. The method of claim 10 , wherein the image sensor comprises an active region, a dummy region surrounding the active region, and a peripheral region surrounding the dummy region,
the first connection line is connected to the first lower electrodes in the dummy region, and
the second connection line is connected to the second lower electrodes in the dummy region.
12. The method of claim 11 , wherein the image sensor further comprises a first pad connected to the first connection line, and
the first pad is disposed in the peripheral region.
13. The method of claim 12 , wherein the image sensor further comprises a second pad connected to the second connection line, and
the second pad is disposed in the peripheral region.
14. The method of claim 13 , wherein the connecting of the measurement unit to the image sensor comprises connecting the measurement unit to the first pad and the second pad.
15. An image sensor comprising:
a substrate having a first surface and a second surface facing each other;
first lower electrodes and second lower electrodes provided on the first surface;
a photoelectric conversion layer covering at least a portion of the second lower electrodes;
an upper electrode covering the photoelectric conversion layer and at least a portion of the first and second lower electrodes;
a first connection line connected to the first lower electrodes; and
a second connection line connected to the second lower electrodes.
16. The image sensor of claim 15 , wherein a number of the second lower electrodes in contact with the upper electrode is smaller than a number of the second lower electrodes connected to the second connection line.
17. The image sensor of claim 15 , further comprising an active region, a dummy region surrounding the active region, and a peripheral region surrounding the dummy region,
wherein the first connection line is connected to the first lower electrodes in the dummy region, and
the second connection line is connected to the second lower electrodes in the dummy region.
18. The image sensor of claim 17 , further comprising:
a first pad contact plug, which penetrates the peripheral region of the substrate and is connected to the first connection line; and
a second pad contact plug, which penetrates the peripheral region of the substrate and is connected to the second connection line.
19. The image sensor of claim 18 , further comprising:
a first pad connected to the first pad contact plug; and
a second pad connected to the second pad contact plug,
wherein the first and second pads are disposed in the peripheral region.
20. The image sensor of claim 17 , wherein bottom surfaces of the first and second pads are provided on a same plane as a bottom surface of the upper electrode.