IP Library Granted Patent US 10,826,005
Granted Patent B2
US 10,826,005 · App. 15/763,290 · Granted Nov 3, 2020

Atomic layer deposition of lead sulfide for infrared optoelectronic devices

Inventors: Sachin Kinge (Steenokkerzeel, BE); Jixian Xu (Toronto, CA); Brandon Sutherland (Mississauga, CA); Sjoerd Hoogland (Toronto, CA); Edward Sargent (Toronto, CA)
Assignees: TOYOTA MOTOR EUROPE; THE GOVERNING COUNCIL OF THE UNIVERSITY OF TORONTO
H01L51/4293H01L31/0324H01L31/035227H01L51/4233Y02E10/549
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Quick Facts
Patent No.
US 10,826,005
App. No.
15/763,290
Granted
Nov 3, 2020
Kind
B2
Abstract

A PIN type infrared photodiode including a first electrode, a n-type semiconductor, an atomic layer deposition coating of lead sulfide, a p-type semiconductor and a second electrode, wherein the n-type semiconductor comprises nanowires conformally coated with the atomic layer deposition coating of lead sulfide.

Claims (26)

1. A PIN type infrared photodiode comprising:

a first electrode,

a n-type semiconductor,

an atomic layer deposition coating containing lead sulfide,

a p-type semiconductor, and

a second electrode,

wherein:

a content of the lead sulfide in the atomic layer deposition coating is at least 95 wt %, and

the n-type semiconductor comprises nanowires conformally coated with the atomic layer deposition coating.

2. The PIN type infrared photodiode according to claim 1 , wherein the nanowires comprises zinc oxide.

3. The PIN type infrared photodiode according to claim 1 , further comprising a coating of titanium dioxide interposed between the nanowires and the atomic layer deposition coating, the coating of titanium dioxide conformally coating the nanowires.

4. The PIN type infrared photodiode according to claim 1 , wherein the p-type semiconductor comprises spiro-MeOTAD.

5. The PIN type infrared photodiode according to claim 1 , wherein the first electrode comprises fluorine-doped tin oxide.

6. The PIN type infrared photodiode according to claim 1 , wherein the atomic layer deposition coating has a thickness equal to or greater than 5 nm.

7. The PIN type infrared photodiode according to claim 1 , wherein the atomic layer deposition coating has a thickness less than or equal to 40 nm.

8. A method for producing a PIN type infrared photodiode, the method comprising:

growing nanowires of a n-type semiconductor; and

conformally coating the nanowires with lead sulfide by atomic layer deposition to form an atomic layer deposition coating containing lead sulfide, wherein a content of the lead sulfide in the atomic layer deposition coating is at least 95 wt %.

9. The method according to claim 8 , further comprising:

before the nanowires are conformally coated with lead sulfide, conformally coating the nanowires with titanium dioxide by atomic layer deposition,

wherein the nanowires comprise zinc oxide.

10. The method according to claim 8 , wherein the nanowires are grown on a fluorine-doped tin oxide substrate.

11. The method according to claim 8 , wherein the lead sulfide is deposited from lead bis(2,2,6,6-tetramethyl-3,5-heptadionate) and hydrogen sulfide precursors.

12. The method according to claim 8 , wherein a number of cycles for the deposition of the lead sulfide is equal to or greater than 10 cycles.

13. The method according to claim 8 , wherein a number of cycles for the deposition of the lead sulfide is less than or equal to 110 cycles.

14. The method according to claim 8 , wherein the nanowires are grown from a liquid solution at temperature below 600° C.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 21, 2021
From: TOYOTA MOTOR EUROPE
To: TOYOTA JIDOSHA KABUSHIKI KAISHA
Reel/Frame 055991/0831 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 25, 2018
From: KINGE, SACHIN
To: TOYOTA MOTOR EUROPE; THE GOVERNING COUNCIL OF THE UNIVERSITY OF TORONTO
Reel/Frame 046460/0684 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 25, 2018
From: XU, JIXIAN; SUTHERLAND, BRANDON; HOOGLAND, SJOERD; SARGENT, EDWARD
To: TOYOTA MOTOR EUROPE; THE GOVERNING COUNCIL OF THE UNIVERSITY OF TORONTO
Reel/Frame 046460/0732 →
Continuity (1)
Related Publication 20180309076A1 · Oct 25, 2018