Integrated circuit device
An integrated circuit device includes channel structures extending from a substrate in a vertical direction, memory cell strings disposed along the plurality of channel structures, gate lines spaced apart from one another in the vertical direction and including erase control lines and string selection lines, and driving transistors including erase control driving transistors connected to the erase control lines and string selection driving transistors connected to the string selection lines.
1. An integrated circuit device comprising:
a plurality of channel structures extending in a vertical direction from a main surface of a substrate;
a plurality of memory cell strings disposed in the vertical direction along the plurality of channel structures, wherein each memory cell string includes a plurality of serially-connected memory cells;
a plurality of gate lines spaced apart from one another in the vertical direction and including erase control lines and string selection lines; and
a plurality of driving transistors including erase control driving transistors connected to the erase control lines and string selection driving transistors connected to the string selection lines,
wherein at least two gate lines spaced apart from one another in a horizontal direction with respect to the main surface of the substrate among the plurality of gate lines are commonly connected to one of the plurality of driving transistors.
2. The integrated circuit device of claim 1 , wherein at least two erase control lines are spaced apart from one another in the horizontal direction and are commonly connected by a common connection wiring line extending in the horizontal direction.
3. The integrated circuit device of claim 2 , further comprising:
a plurality of bit lines respectively connected to the plurality of memory cell strings, extending in the horizontal direction, and disposed at a level different from that of the common connection wiring line.
4. The integrated circuit device of claim 2 , further comprising:
at least two blocks including a first block and a second block,
wherein the common connection wiring line commonly connects erase control lines of the first block to erase control lines of the second block.
5. The integrated circuit device of claim 1 , wherein a thickness of at least one of the erase control lines is greater than a thickness of at least one of the string selection lines.
6. The integrated circuit device of claim 1 , further comprising:
a plurality of word lines respectively connected to the plurality of memory cell strings,
wherein a width of each one of the plurality of word lines in the horizontal direction is at least twice a width of each one of the plurality of gate lines.
7. The integrated circuit device of claim 6 , wherein each one of the plurality of channel structures includes a gate insulating layer contacting at least one of the plurality of gate lines and at least one of the plurality of word lines, and
a thickness of a first portion of the gate insulating layer facing a side surface of the erase control line is less than a thickness of a second portion of the gate insulating layer facing side surfaces of the plurality of word lines.
8. The integrated circuit device of claim 6 , wherein each one of the plurality of channel structures includes a gate insulating layer contacting at least one of the plurality of gate lines and at least one of the plurality of word lines, and
a thickness of a first portion of the gate insulating layer contacting a side surface of the erase control line is less than a thickness of a second portion of the gate insulating layer contacting a side surface of the string selection line.
9. The integrated circuit device of claim 6 , wherein each one of the plurality of channel structures includes a gate insulating layer contacting at least one of the plurality of gate lines and at least one of the plurality of word lines, and
a thickness of a first portion of the gate insulating layer contacting a side surface of the string selection line is less than a thickness of a second portion of the gate insulating layer contacting a side surface of at least one of the plurality of word lines.
10. The integrated circuit device of claim 6 , wherein each one of the plurality of channel structures includes a gate insulating layer contacting at least one of the plurality of gate lines and at least one of the plurality of word lines, and a channel layer disposed on the gate insulating layer, and
an uppermost end of the channel layer is disposed at a level less than or equal to a level at which an uppermost end of the gate insulating layer is disposed.
11. The integrated circuit device of claim 1 , wherein at least two erase control lines spaced apart from one another in the horizontal direction are commonly connected to one erase control driving transistor, and
each of the at least two string selection lines spaced apart from one another in the horizontal direction is connected to one of the at least two string selection driving transistors.
12. The integrated circuit device of claim 1 , wherein, in at least one of the erase control lines and one of the string selection lines are spaced apart from one another in the vertical direction.
13. An integrated circuit device comprising:
channel structures extending in a vertical direction from a substrate;
bit lines respectively connected to the channel structures and extending in a first horizontal direction;
gate electrodes vertically stacked on the substrate, intersecting the channel structures, having a stepped pattern, and extending in a second horizontal direction over the substrate; and
an erase control driving transistor and at least two string selection driving transistors,
wherein at least two of the gate electrodes respectively function as erase control lines, at least another two of the gate electrodes respectively function as string selection lines, the erase control lines and the string selection lines are spaced apart from one another in the first horizontal direction, the erase control lines are commonly connected to the erase control driving transistor, and each of the string selection lines is respectively connected to one of the at least two string selection driving transistors.
14. The integrated circuit device of claim 13 , further comprising:
a common connection wiring line extending from one end of each of the at least two erase control lines in the first horizontal direction,
wherein the at least two erase control lines are commonly connected by the common connection wiring line.
15. The integrated circuit device of claim 14 , wherein the bit lines extend in the first horizontal direction at a level different from that of the common connection wiring line.
16. The integrated circuit device of claim 13 , wherein the gate electrode other than the at least two of the gate electrodes functioning as erase control lines and the at least another two of the gate electrodes functioning as string selection lines function as word lines, and
a width of each one of the at least two erase control lines and the at least two string selection lines is less than one half of a width of each one of the word lines in the first horizontal direction.
17. An integrated circuit device comprising:
channel structures extending in a vertical direction from a substrate;
memory cell strings disposed in the vertical direction along the channel structures, wherein each one of the memory cell strings includes serially-connected memory cells;
gate electrodes spaced apart from one another in the vertical direction, intersecting the channel structures, and extending in a second horizontal direction over the substrate; and
driving transistors including erase control driving transistors and string selection driving transistors,
wherein the gate electrodes include word lines, erase control lines, and string selection lines,
the at least two of the erase control lines are spaced apart from one another in a first horizontal direction and are commonly connected to one erase control driving transistor, and
the at least two string selection lines are spaced apart from one another in the first horizontal direction and are respectively connected to the at least two string selection driving transistors.
18. The integrated circuit device of claim 17 , wherein a width of each one of the word lines is at least twice that of a width of each one of the erase control lines and the string selection lines in the first horizontal direction.
19. The integrated circuit device of claim 17 , wherein a common connection wiring line commonly connects the at least two erase control lines to at least two of the bit lines.
20. The integrated circuit device of claim 19 , wherein the common connection wiring line extends from a stepped one end of the erase control line in the first horizontal direction.