Cylindrical X-ray tube and manufacturing method thereof
A cylindrical X-ray tube having an outer insulating layer, a cathode electrode and an anode electrode disposed at both ends of the outer insulating layer, a gate electrode disposed between the cathode and anode electrodes, an emitter, and a target, comprises an inner insulating layer which is disposed between the cathode electrode and the outer insulating layer, is formed to extend downward in a coaxial direction with the outer insulating layer, and is pre-adjusted in order to secure an insulating distance between the cathode electrode and the gate electrode. Thus, by providing a separate internal insulating layer extending coaxially with the external insulating layer between the cathode electrode and the external insulating layer, the insulating distance between the cathode electrode and the gate electrode, the insulating distance between the cathode electrode and the anode electrode may be easily adjusted, so that a desired insulating capability can be secured.
1. A cylindrical X-ray tube having an outer insulating layer, a cathode electrode and an anode electrode disposed at both ends of the outer insulating layer, a gate electrode disposed between the cathode electrode and the anode electrode, an emitter, and a target, comprises an inner insulating layer which is disposed between the cathode electrode and the outer insulating layer, is formed to extend downward in a coaxial direction with the outer insulating layer, and is pre-adjusted in order to secure an insulating distance between the cathode electrode and the gate electrode.
2. The cylindrical X-ray tube of claim 1 , wherein the cathode electrode is spaced apart from the gate electrode by a predetermined distance, hermetically seals a bottom surface of the inner insulating layer so as not to be exposed the bottom surface of the inner insulating layer to outside, and extends upward in a coaxial direction with the inner insulating layer.
3. The cylindrical X-ray tube of claim 1 , wherein bottom surfaces of the cathode electrode and the gate electrode are electrically contacted to an external power supply circuit.
4. The cylindrical X-ray tube of claim 1 , wherein the emitter is formed of a nanostructure made of carbon nanotubes.
5. The cylindrical X-ray tube of claim 1 , wherein the gate electrode is spaced apart from the cathode electrode by a predetermined distance, hermetically seals the bottom surface of the outer insulating layer so as not to be exposed the bottom surface of the outer insulating layer to the outside, and extends upward in a coaxial direction with e outer insulating layer.
6. The cylindrical X-ray tube of claim 1 , wherein a lower space of the inner insulating layer is hermetically sealed by the cathode electrode, a space between the inner insulating layer and the outer insulating layer is hermetically sealed by the gate electrode, and an upper space of the outer insulating layer is hermetically sealed by the anode electrode.
7. The cylindrical X-ray tube of claim 1 further comprises a focusing electrode disposed on the gate electrode, for focusing electron beam accelerating toward the anode electrode.
8. A manufacturing method of a cylindrical X-ray tube comprising;
forming an inner insulating layer;
forming a cathode electrode which is spaced apart from an upper opening surface of the inner insulating layer by a predetermined distance, is extended upward while hermetically sealing a lower surface of the inner insulating;
forming an outer insulating layer in a coaxial direction by which is outward spaced apart from the inner insulating layer by a predetermined distance;
forming a gate electrode which is spaced apart from the cathode electrode by a predetermined distance, is extended upward while hermetically sealing a lower surface of the outer insulating layer; and,
forming an anode electrode by hermetically sealing an upper surface of the outer insulating layer, extending upwardly, and hermetically sealing an opening surface of the outer insulating layer.
9. The manufacturing method of a cylindrical X-ray tube of claim 8 further comprises disposing an emitter on the cathode electrode after the step of forming a cathode electrode.
10. The manufacturing method of a cylindrical X-ray tube of claim 9 , wherein the emitter is formed of a nanostructure made of carbon nanotubes.
11. The manufacturing method of a cylindrical X-ray tube of claim 8 further comprises forming a focusing electrode on the gate electrode in order to focus electron beam traveling toward the anode electrode before the step of forming an anode electrode.