Plasma generating system having thermal barrier between plasma reactor and waveguide
A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and an EM seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.
1. A plasma generating system, comprising:
a waveguide for transmitting a microwave energy therethrough;
an inner wall disposed within the waveguide to define a plasma cavity, a plasma being generated within the plasma cavity using the microwave energy;
an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and
a first electromagnetic (EM) seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.
2. A plasma generating system as recited in claim 1 , wherein the first electromagnetic (EM) seal is a washer.
3. A plasma generating system as recited in claim 1 , wherein the first electromagnetic (EM) seal is a coil spring.
4. A plasma generating system as recited in claim 1 , wherein the adaptor includes:
an adaptor body having the gas outlet;
a seal container detachably secured to the adaptor body and having a notch, the inner wall being disposed between the adaptor body and the seal container; and
a gas seal disposed in the notch and configured to block a leakage of gas through a second gap between the adaptor body and the inner wall.
5. A plasma generating system as recited in claim 4 , wherein the gas seal is formed of a graphite.
6. A plasma generating system as recited in claim 4 , further comprising;
a coating formed on a portion of the inner wall and made of a material that blocks microwave energy and configured to prevent microwave energy from reaching the gas seal.
7. A plasma generating system as recited in claim 4 , further comprising;
a second electromagnetic (EM) seal disposed in the second gap and configured to prevent microwave energy from reaching the gas seal.
8. A plasma generating system as recited in claim 7 , wherein the second electromagnetic (EM) seal is a coil spring.
9. A plasma generating system as recited in claim 4 , further comprising;
a metal sheet disposed in the second gap and configured to prevent microwave energy from reaching the gas seal.
10. A plasma generating system as recited in claim 4 , wherein the adaptor body includes a hole for receiving an input gas from outside of the adaptor and is configured to generate a vortex flow within the plasma cavity using the input gas.
11. A plasma generating system as recited in claim 10 , wherein the adaptor body has one or more passageways through which the input gas is introduced into the plasma cavity and each of the one or more passageways is arranged to impart a vortical motion to the input gas that passes therethrough.
12. A plasma generating system as recited in claim 1 , further comprising:
a flow inlet mounted on a second side of the waveguide and configured to introduce an input gas into the plasma cavity and generate a vortex flow within the plasma cavity using the input gas, the flow inlet being physically separated from the waveguide by a third gap.
13. A plasma generating system as recited in claim 12 , further comprising:
a third electromagnetic (EM) seal mounted in the third gap and configured to block leakage of microwave energy through the third gap.
14. A plasma generating system as recited in claim 13 , wherein the third electromagnetic (EM) seal is a washer.
15. A plasma generating system as recited in claim 14 , wherein the washer is formed of an electrically conducting material.
16. A plasma generating system as recited in claim 13 , wherein the third electromagnetic (EM) seal is a coil spring.
17. A plasma generating system as recited in claim 12 , wherein the flow inlet includes:
a flow inlet body having a hole for receiving the input gas from outside of the flow inlet;
a lid detachably secured to the flow inlet body and defining an enclosed chamber that is in fluid communication with the hole in the flow inlet body; and
a vortex generator mounted on the flow inlet body and having a hole that is in fluid communication with the chamber and configured to generate the vortex flow within the plasma cavity using the input gas.
18. A plasma generating system as recited in claim 17 , wherein the vortex generator includes one or more passageways through which the input gas flows and each of the one or more passageways is arranged to impart a vortical motion to the input gas that passes therethrough.
19. A plasma generating system as recited in claim 17 , further comprising:
a gas seal disposed in a fourth gap between the inner wall and the flow inlet body and configured to seal leakage of gas through the fourth gap.
20. A plasma generating system as recited in claim 19 , wherein the gas seal is formed of elastomeric material.
21. A plasma generating system as recited in claim 19 , wherein the gas seal is formed of a graphite.
22. A plasma generating system as recited in claim 19 , further comprising;
a coating formed on a portion of the inner wall and made of a material that blocks microwave energy and configured to prevent microwave energy from reaching the gas seal.
23. A plasma generating system as recited in claim 17 , further comprising:
a seal container detachably secured to the flow inlet body and having a notch, the inner wall being disposed between the flow inlet body and the seal container; and
a gas seal disposed in the notch and configured to block a leakage of gas through a fourth gap between the flow inlet body and the inner wall.
24. A plasma generating system as recited in claim 23 , wherein the gas seal is formed of a graphite.
25. A plasma generating system as recited in claim 23 , further comprising;
a coating formed on a portion of the inner wall and made of a material that blocks microwave energy and configured to prevent microwave energy from reaching the gas seal.
26. A plasma generating system as recited in claim 23 , further comprising;
a second electromagnetic (EM) seal disposed in the fourth gap and configured to prevent microwave energy from reaching the gas seal.
27. A plasma generating system as recited in claim 26 , wherein the second electromagnetic (EM) seal is a coil spring.
28. A plasma generating system as recited in claim 23 , further comprising;
a metal sheet disposed in the fourth gap and configured to prevent microwave energy from reaching the gas seal.