Systems, apparatus, and methods for an improved load port
Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.
1. A method comprising:
flooding an equipment front end module (EFEM) with a non-reactive gas that is non-reactive to substrates to be passed through the EFEM; and
purging an isolation compartment of a load port coupled to the EFEM of reactive gas trapped within the isolation compartment using a non-reactive purge gas, wherein an elevator disposed within the isolation compartment is coupled to an elevator arm that extends from the isolation compartment into the EFEM through an opening to raise and lower a carrier arm within the EFEM.
2. The method of claim 1 further comprising supplying the non-reactive purge gas to the isolation compartment through a housing of the load port that surrounds the isolation compartment.
3. The method of claim 1 , wherein the reactive gas trapped within the isolation compartment is oxygen and the non-reactive purge gas is nitrogen.
4. The method of claim 1 , wherein the purging of the isolation compartment is performed concurrently with the flooding of the EFEM with the non-reactive gas.
5. The method of claim 1 , wherein the purging of the isolation compartment comprises using a fan.
6. The method of claim 1 , wherein the non-reactive purge gas is provided within the isolation compartment at a lower end of the isolation compartment and the purging of the reactive gas trapped within the isolation compartment comprises forcing the reactive gas up out of the isolation compartment.
7. The method of claim 1 , wherein a first volume of the isolation compartment is partially isolated from a second volume of the EFEM, and wherein the isolation compartment is in fluid communication with the EFEM via the opening.
8. A method comprising:
providing a non-reactive gas into an equipment front end module (EFEM), wherein the non-reactive gas is non-reactive to substrates to be passed through the EFEM; and
removing reactive gas from an isolation compartment of a load port coupled to the EFEM, wherein an elevator disposed within the isolation compartment is coupled to an elevator arm that extends from the isolation compartment into the EFEM through an opening to raise and lower a carrier arm within the EFEM.
9. The method of claim 8 , wherein the removing of the reactive gas from the isolation compartment comprises providing a non-reactive purge gas to the isolation compartment.
10. The method of claim 9 , wherein the providing of the non-reactive purge gas is via a non-reactive purge gas supply disposed in the isolation compartment.
11. The method of claim 8 , wherein the removing of the reactive gas from the isolation compartment is via a fan disposed in the isolation compartment.
12. The method of claim 8 , wherein the removing of the reactive gas from the isolation compartment is via a fan disposed in the EFEM.
13. The method of claim 8 , wherein the removing of the reactive gas from the isolation compartment is via a vent that comprises a one-way check valve to allow the reactive gas out of the isolation compartment.
14. The method of claim 8 , wherein a first volume of the isolation compartment is partially isolated from a second volume of the EFEM, and wherein the isolation compartment is in fluid communication with the EFEM via the opening.
15. A method comprising:
removing reactive gas from an isolation compartment of a load port coupled to an equipment front end module (EFEM); and
actuating an elevator disposed in the isolation compartment, wherein the elevator is coupled to an elevator arm that extends from the isolation compartment into the EFEM through an opening to raise and lower a carrier arm within the EFEM.
16. The method of claim 15 , wherein the removing of the reactive gas from the isolation compartment comprises providing a non-reactive purge gas to the isolation compartment.
17. The method of claim 16 , wherein the providing of the non-reactive purge gas is via a non-reactive purge gas supply disposed in the isolation compartment.
18. The method of claim 15 , wherein the removing of the reactive gas from the isolation compartment is via a fan disposed in the isolation compartment.
19. The method of claim 15 , wherein the removing of the reactive gas from the isolation compartment is via a fan disposed in the EFEM.
20. The method of claim 15 , wherein the removing of the reactive gas from the isolation compartment is via a vent that comprises a one-way check valve to allow the reactive gas out of the isolation compartment.