Micro LED transfer head
The present invention relates to a micro LED transfer head improving efficiency of transferring micro LEDs.
1. A micro LED transfer head, comprising:
a support member;
a grip member provided under the support member for gripping a micro LED with a vacuum-suction force;
a vacuum chamber provided inside the support member and provided on the grip member; and
a porous member provided inside the vacuum chamber and positioned on the grip member,
wherein a lower surface of the porous member is positioned on an upper surface of the grip member,
wherein the grip member is constituted by stacking multiple layers, and vertical suction holes of the respective layers of the grip member are configured in a manner corresponding to each other.
2. The micro LED transfer head of claim 1 , wherein the grip member includes an anodic oxide film formed by anodizing a metal.
3. The micro LED transfer head of claim 1 , wherein the grip member is configured such that a width of the suction holes is increased in an upward direction.