Bonding sheet and manufacturing method thereof, and heat dissipation mechanism and manufacturing method thereof
A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.
1. A manufacturing method of a bonding sheet, the method comprising:
forming a plurality of carbon nanotubes and a film covering upper ends of the plurality of carbon nanotubes, the plurality of carbon nanotubes standing from a base substance;
injecting, into a gap among the plurality of carbon nanotubes, a first solvent with particles of a first metal;
eliminating the first solvent from the gap by drying the first solvent; and
after eliminating the first solvent, injecting, into the gap, a second solvent with particles of a second metal, wherein
the forming of the plurality of carbon nanotubes and the film includes:
forming a first layer, as the film, including a plurality of vertical graphenes, the plurality of vertical graphenes standing in a direction vertical to a surface of the base substance; and
forming the plurality of carbon nanotubes between the base substance and the first layer including a plurality of vertical graphenes.
2. The manufacturing method according to claim 1 , wherein
after injecting the second solvent into the gap, eliminating the second solvent from the gap by drying the second solvent.
3. The manufacturing method according to claim 2 , wherein
the first solvent is a same solvent as the second solvent, and
the first metal is a same metal as the second metal.
4. The manufacturing method according to claim 3 , wherein
the film includes a metal material.
5. The manufacturing method according to claim 3 , wherein
each of the first solvent and the second solvent is an organic solvent.
6. The manufacturing method according to claim 3 , wherein
in the injecting of the first solvent, the plurality of carbon nanotubes with the film is dipped into a first liquid of the first solvent; and
in the injecting of the second solvent, the plurality of carbon nanotubes with the film is dipped into a second liquid of the second solvent.
7. The manufacturing method according to claim 1 , wherein
the forming of the first layer includes:
forming a catalytic film over the base substance;
forming, over the catalytic film, a second layer including horizontal vertical graphene; and
forming the first layer between the second film and the catalytic film.