Semiconductor device and semiconductor device package including same
Disclosed in one embodiment is a semiconductor device comprising: a light-emitting structure including a first conductive semiconductor layer, a second conductive semiconductor layer, and an active layer arranged between the first conductive semiconductor layer and the second conductive semiconductor layer; a first electrode electrically connected with the first conductive semiconductor layer; a second electrode electrically connected with the second conductive semiconductor layer; a reflective layer arranged on the second electrode; and a capping layer arranged on the reflective layer and including a plurality of layers, wherein the capping layer includes a first layer directly arranged on the reflective layer and the first layer includes Ti.
1. A semiconductor device comprising:
a light-emitting structure including a first conductive semiconductor layer, a second conductive semiconductor layer, and an active layer disposed between the first conductive semiconductor layer and the second conductive semiconductor layer;
first electrodes electrically coupled to the first conductive semiconductor layer; and
a second electrode electrically coupled to the second conductive semiconductor layer,
wherein the first electrodes include a first layer, a second layer, and a third layer,
the first layer includes a first metal layer including a first metal, and
a diffusion coefficient of the first metal is greater than a diffusion coefficient of a third metal included in the third layer,
wherein the first layer is contact with the first conductive semiconductor layer,
wherein the second layer is disposed between the first metal layer and the third layer, and
wherein a thickness of the second layer is in a range of 0.4 to 0.53 times a thickness of the first metal layer.
2. The semiconductor device of claim 1 , wherein the first layer further includes:
a 1 st -1 layer; and
a 1 st -2 layer disposed between the 1 st -1 layer and the first metal layer, and
wherein a thickness of the first metal layer is in a range of 1.5 to 2.5 times the sum of thicknesses of the 1 st -1 layer and the 1 st -2 layer.
3. The semiconductor device of claim 2 , wherein the 1 st -1 layer includes Cr, and
wherein the 1 st -2 layer includes Ti.
4. The semiconductor device of claim 1 , further comprising a reflective layer disposed on the second electrode; and
a capping layer disposed on the reflective layer and including a plurality of layers.
5. The semiconductor device of claim 1 , wherein the light-emitting structure further includes a plurality of recesses passing through the second conductive semiconductor layer and the active layer and extending to a partial region of the first conductive semiconductor layer, and
the first electrodes are disposed in the plurality of recesses.
6. The semiconductor device of claim 5 , wherein the first metal is Al, and
a ratio of an Al ratio of the first region to an Al ratio of the second region is in a range of 1:1.5 to 1:2.5.
7. The semiconductor device of claim 1 , wherein the first layer includes a first region and a second region,
a ratio of the first metal included in the second region is greater than a ratio of the first metal included in the first region, and
a thickness ratio of the first region to the second region is in a range of 3:7 to 6.3:3.5.