Structure and method for enhancing robustness of ESD device

1. A method of enhancing robustness of a bipolar electrostatic discharge (ESD) device, comprising:

providing a bipolar junction transistor comprising:

an emitter region, the emitter region being connected to a power supply node;

a base region, the base region being connected to the power supply node; and

a collector region between the base region and the emitter region, the collector region being connected to a ground node;

providing an isolation structure between the emitter region and the collector region; and

modifying a ballasting characteristic at the isolation structure by inserting a plurality of partition structures therein, each partition structure extends substantially abreast at least one of the emitter region and the collector region.

2. The method of claim 1 , wherein the insertion of the partition structures affects a steeper slope on a lateral surface of the isolation structure bordering at least one of the emitter region and the collector region.

3. The method of claim 1 , wherein at least one of the emitter region and the collector region is provided with an elongated planar profile.

4. The method of claim 3 , wherein the emitter region and the collector region cooperatively define a finger structure of a multi-finger ESD protection device.

5. The method of claim 1 , wherein the isolation structure is provided with an elongated planar profile and having at least a section extending along and between the emitter region and the collector region.

6. The method of claim 5 , wherein each partition structure extends substantially parallel to at least one of the emitter region and the collector region.

7. The method of claim 1 , wherein the partition structures comprises a dummy OD region.

8. The method of claim 1 , wherein top surfaces of the partition structures are covered by an insulator.

9. A method comprising:

forming a barrier layer in a substrate;

forming an emitter region of a first dopant type in the substrate, the emitter region being over the barrier layer;

forming a collector region of a second dopant type in the substrate, the collector region being over the barrier layer, the second dopant type being different from the first dopant type; and

forming a first isolation structure comprising:

a first portion proximate the emitter region;

a second portion proximate the collector region; and

a third portion disposed between the first portion and the second portion, each of the first portion, the second portion, and the third portion having parallel longitudinal axes, each of the first portion, the second portion, and the third portion disposed between the emitter region and the collector region, the third portion and the first portion separated by a first partition structure, the third portion and the second portion separated by a second partition structure.

10. The method of claim 9 , wherein the barrier layer has the first dopant type.

11. The method of claim 9 , further comprising:

forming an insulating structure on a major surface of the substrate, the insulating structure being on the first portion, the second portion, and the third portion of the first isolation structure.

12. The method of claim 9 further comprising:

forming a base region of the first dopant type in the substrate, the base region being over the barrier layer, the collector region between disposed between the base region and the emitter region; and

forming a second isolation structure disposed between the base region and the collector region, the second isolation structure being a single structure extending continuously between the base region and the collector region.

13. The method of claim 12 , wherein first sidewalls of the first isolation structure form a first angle with a major surface of the substrate, and second sidewalls of the second isolation structure form a second angle with the major surface of the substrate, the first angle being different from the second angle.

14. The method of claim 9 , wherein the emitter region is connected to a power supply node, and the collector region is connected to a ground node.

15. The method of claim 9 further comprising:

forming a silicide block on the first portion, the second portion, and the third portion of the first isolation structure.

16. A method comprising:

forming a first deep well of a first dopant type in a substrate;

forming a first shallow well of the first dopant type in the first deep well;

forming a second deep well of a second dopant type in the substrate, the second deep well adjoining the first deep well, the second dopant type being different from the first dopant type;

forming a second shallow well of the second dopant type in the second deep well;

forming a first dielectric structure in the first shallow well;

forming a second dielectric structure in the second shallow well;

forming a third dielectric structure in the first deep well and the second deep well, the third dielectric structure being disposed between the first dielectric structure and the second dielectric structure;

forming a third deep well of the first dopant type in the substrate, the third deep well adjoining the second deep well;

forming a third shallow well of the first dopant type in the third deep well; and

forming a fourth dielectric structure in the third shallow well, the third deep well, the second shallow well, and the second deep well,

wherein the first dielectric structure, the second dielectric structure, and the third dielectric structure each extending lengthwise in a same first direction along a major surface of the substrate, and

wherein the fourth dielectric structure extends lengthwise in the first direction along the major surface of the substrate.

17. The method of claim 16 , wherein the first shallow well has a higher dopant concentration than the first deep well, and the second shallow well has a higher dopant concentration than the second deep well.

18. The method of claim 16 , wherein a portion of the first deep well and a portion of the first shallow well are disposed between the first dielectric structure and the second dielectric structure, and wherein a portion of the second deep well and a portion of the second shallow well are disposed between the second dielectric structure and the third dielectric structure.

19. The method of claim 16 further comprising:

forming a silicide block on the first dielectric structure, the second dielectric structure, and the third dielectric structure.

20. The method of claim 16 further comprising:

forming an emitter node in the first shallow well, the emitter node being connected to a power supply node; and

forming a collector node in the second shallow well, the collector node being connected to a ground node.