Fin field effect transistor (FinFET) device structure and method for forming the same

1. A method for forming a fin field effect transistor (FinFET) device structure, comprising:

forming a fin structure over a substrate;

forming an isolation structure over the substrate, wherein a portion of the fin structure is embedded in the isolation structure; and

forming a gate structure over the fin structure and the isolation structure, wherein the gate structure comprises a gate electrode layer which comprises an upper portion above the fin structure and a lower portion below an upper surface of the fin structure, and the lower portion has a tapered width which is gradually tapered from a virtual interface to a bottom surface of the lower portion, the virtual interface is formed between the upper portion and the lower portion, wherein forming the gate structure comprises:

forming a dummy gate structure;

forming an inter-layer dielectric (ILD) structure over the substrate and adjacent to the dummy gate structure;

removing the dummy gate structure to form a trench in the ILD structure; and

forming a gate dielectric layer and a gate electrode layer in the trench to form the gate structure.

2. The method of claim 1 , wherein forming the dummy gate structure comprises:

forming a gate material over the fin structure and the isolation structure;

forming a hard mask layer over the gate material;

patterning the hard mask layer; and

etching the gate material by using the hard mask layer as a mask to form the dummy gate structure.

3. The method of claim 2 , wherein etching the gate material comprises using an etching process at a pressure in a range from about 10 torr to about 100 torr.

4. The method of claim 2 , wherein the etching is performed using an etching gas, wherein a ratio of an amount of the etching gas in an edge region of the substrate to that of the etching gas in an overall region is in a range from about 50 vol. % to about 90 vol. %.

5. The method of claim 1 , further comprising epitaxially growing source/drain regions after forming the dummy gate structure.

6. A method for forming a fin field effect transistor (FinFET) device structure, comprising:

forming a fin structure over a substrate;

forming an isolation structure over the substrate, wherein the fin structure protrudes above an upper surface of the isolation structure;

forming a first layer over the fin structure and the isolation structure;

etching the first layer to form a first gate such that a width of the first gate is narrower adjacent the isolation structure than at an upper surface of the fin structure along a line parallel to a longitudinal axis of the fin structure;

forming a dielectric layer along opposing sides of the first gate;

removing the first gate to form a recess in the dielectric layer; and

forming a second gate in the recess.

7. The method of claim 6 , wherein the etching is performed using a plasma etching process.

8. The method of claim 7 wherein the plasma etching process uses HBR as an etching gas.

9. The method of claim 8 , wherein a flow rate of the etching gas is in a range from about 700 sccm to about 1000 sccm.

10. The method of claim 9 , wherein the plasma etching process is performed at a power in a range from about 350 Watt to about 1500 Watt.

11. The method of claim 10 , wherein the plasma etching process is performed at a pressure in a range from about 10 torr to about 100 torr.

12. The method of claim 7 , wherein a ratio of an amount of an etching gas in an edge region of the substrate to that of the etching gas in an overall region is in a range from about 50 vol. % to about 90 vol. %.

13. A method for forming a fin field effect transistor (FinFET) device structure, comprising:

forming a fin structure over a substrate;

forming an isolation structure over the substrate, wherein the fin structure protrudes above an upper surface of the isolation structure;

forming a dummy gate layer over the fin structure and the isolation structure;

patterning the dummy gate layer to form a dummy gate, wherein the dummy gate has a virtual interface between an upper portion and a lower portion, the lower portion having a tapered width that is gradually tapered from the virtual interface to a bottom surface of the lower portion;

forming a first spacer along a first sidewall of the dummy gate and a second spacer along a second sidewall of the dummy gate;

forming a dielectric layer adjacent the first spacer and the second spacer;

removing the dummy gate; and

forming a gate electrode between the first spacer and the second spacer.

14. The method of claim 13 , wherein the upper portion has a top surface with a first width, and the lower portion has a bottom surface with a second width, and the first width is greater than the second width.

15. The method of claim 14 , wherein the virtual interface has a third width, and the third width is greater than the second width.

16. The method of claim 13 , wherein the virtual interface is substantially level with a top surface of the fin structure.

17. The method of claim 13 , wherein the upper portion of the gate electrode has substantially vertical sidewalls.

18. The method of claim 13 , wherein the upper portion of the gate electrode has a first height from the virtual interface to an upper surface of the gate electrode, and the lower portion of the gate electrode has a second height from the virtual interface to a bottom surface of the gate electrode, and the first height is greater than the second height.

19. The method of claim 13 , wherein the gate electrode overlaps an end of the fin structure.

20. The method of claim 6 , wherein the second gate overlaps an end of the fin structure.