Wavelength conversion element, method for producing wavelength conversion element, light source device, and projector
A wavelength conversion element includes a wavelength conversion layer which has a first face on which an excitation light is incident and a second face facing the first face, a first layer which is provided facing the second face and contains a first inorganic oxide, a second layer which is provided facing the first layer and contains a first metal or a second inorganic oxide that is different from the first inorganic oxide, and a third layer which is provided facing the second layer, contains either silver or aluminum, and reflects the excitation light or a light obtained by wavelength conversion of the excitation light by the wavelength conversion layer.
1. A wavelength conversion element, comprising:
a wavelength conversion layer which has a first face on which an excitation light is incident and a second face facing the first face;
a first layer which is provided facing the second face and contains a first inorganic oxide;
a second layer which is provided facing the first layer and contains a first metal or a second inorganic oxide that is different from the first inorganic oxide; and
a third layer which is provided facing the second layer, contains either silver or aluminum, and reflects the excitation light or a light obtained by wavelength conversion of the excitation light by the wavelength conversion layer, wherein
the wavelength conversion layer includes a pore inside,
the second face has a recess, and
a part of the first layer is provided in the recess.
2. The wavelength conversion element according to claim 1 , further comprising:
a fourth layer which is provided facing the third layer and contains the first metal or a second metal that is different from the first metal; and
a fifth layer which is provided facing the fourth layer and contains the first inorganic oxide or the second inorganic oxide.
3. The wavelength conversion element according to claim 2 , wherein
the wavelength conversion element further comprises a substrate, and
the fifth layer and the substrate are bonded to each other by a bonding material provided between the fifth layer and the substrate.
4. The wavelength conversion element according to claim 2 , further comprising a sixth layer which contains the first metal or the second inorganic oxide between the third layer and the fourth layer.
5. The wavelength conversion element according to claim 4 , wherein
the first metal of the sixth layer is at least one metal selected from Al, Ni, Ti, W, and Nb.
6. The wavelength conversion element according to claim 4 , wherein
the second inorganic oxide of the sixth layer is an electrically conductive oxide material or an amorphous electrically conductive oxide.
7. The wavelength conversion element according to claim 1 , wherein
the first metal of the second layer is at least one metal selected from Al, Ni, Ti, W, and Nb.
8. The wavelength conversion element according to claim 1 , wherein
the second inorganic oxide of the second layer is an electrically conductive oxide material or an amorphous electrically conductive oxide.
9. A light source device, comprising:
the wavelength conversion element according to claim 1 ; and
a light source which emits the excitation light.
10. A projector, comprising:
the light source device according to claim 9 ;
a light modulator which modulates a light from the light source device in accordance with image information to form an image light; and
a projection optical system which projects the image light.
11. A wavelength conversion element, comprising:
a wavelength conversion layer which has a first face on which an excitation light is incident and a second face facing the first face;
a first layer which is provided facing the second face and contains a first inorganic oxide;
a second layer which is provided facing the first layer and contains tin oxide, the first layer being provided between the second face and the second layer; and
a third layer which is provided facing the second layer, contains either silver or aluminum, and reflects the excitation light or a light obtained by wavelength conversion of the excitation light by the wavelength conversion layer, wherein
the wavelength conversion layer includes a pore inside,
the second face has a recess, and
a part of the first layer is provided in the recess.
12. The wavelength conversion element according to claim 11 ,
the third layer is provided in direct contact with the second layer.
13. The wavelength conversion element according to claim 11 , further comprising:
a fourth layer which is provided facing the third layer and contains a second inorganic oxide that is different from the first inorganic oxide.
14. The wavelength conversion element according to claim 13 , wherein
the second inorganic oxide of the fourth layer is tin oxide.
15. A light source device, comprising:
the wavelength conversion element according to claim 11 ; and
a light source which emits the excitation light.
16. A projector, comprising:
the light source device according to claim 15 ;
a light modulator which modulates a light from the light source device in accordance with image information to form an image light; and
a projection optical system which projects the image light.
17. The wavelength conversion element according to claim 11 , wherein
the first layer includes a plurality of films, and
a first film of the plurality of films is in direct contact with the second face and contains silicon dioxide.
18. The wavelength conversion element according to claim 11 , wherein a film thickness of the second layer is greater than or equal to 1 nm and is less than or equal to 20 nm.