Three-dimensional memory device and method for forming the same
Three-dimensional (3D) memory devices and methods for forming the 3D memory devices are provided. In one example, a 3D memory device includes a substrate, a memory stack including interleaved conductive layers and dielectric layers on the substrate, and a staircase structure on one side of the memory stack. The 3D memory device also includes a staircase contact in the staircase structure and a plurality of dummy source structures each extending vertically through the staircase structure. The plurality of dummy source structures surround the staircase contact.
1. A three-dimensional (3D) memory device, comprising:
a substrate;
a memory stack comprising interleaved conductive layers and dielectric layers on the substrate;
a staircase structure on one side of the memory stack;
a staircase contact in the staircase structure; and
a plurality of dummy source structures each extending vertically through the staircase structure, the plurality of dummy source structures surrounding the staircase contact,
wherein each of the dummy source structures comprises a conductive contact.
2. The 3D memory device of claim 1 , wherein the plurality of dummy source structures are located adjacent to the staircase contact.
3. The 3D memory device of claim 1 , wherein at least two of the plurality of dummy source structures are of nominally equal lateral distances to the staircase contact.
4. The 3D memory device of claim 1 , wherein the plurality of dummy source structures are of nominally equal lateral distances to the staircase contact.
5. The 3D memory device of claim 1 , wherein in a plan view, at least two of the plurality of dummy source structures are arranged in a first row that extends along a first lateral direction.
6. The 3D memory device of claim 5 , wherein in the plan view, at least two other dummy source structures are arranged in a second row that extends along a second lateral direction perpendicular to the first lateral direction.
7. The 3D memory device of claim 5 , further comprising a plurality of dummy channel structures surrounding the staircase contact, each dummy channel structure extending vertically through the staircase structure.
8. The 3D memory device of claim 7 , wherein the plurality of dummy channel structures are of nominally equal lateral distances to the staircase contact.
9. The 3D memory device of claim 7 , wherein in the plan view, the plurality of dummy source structures interleave with the plurality of dummy channel structures.
10. The 3D memory device of claim 7 , wherein in the plan view, at least two of the plurality of dummy channel structures are arranged in a third row that extends along a third lateral direction in parallel with the first or the second lateral direction.
11. The 3D memory device of claim 1 , comprising first and second staircase contacts, wherein at least one dummy source structure is located between the first and second staircase contacts.
12. The 3D memory device of claim 1 , wherein at least two dummy source structures are located between the first and second staircase contacts.
13. The 3D memory device of claim 1 , wherein the conductive contact comprises a conductor layer, and wherein the at least one dummy source structure further comprises a spacer surrounding the conductor layer along a sidewall of the conductor layer, the spacer comprising a dielectric material.
14. A three-dimensional (3D) memory device, comprising:
a substrate;
a memory stack comprising interleaved conductive layers and dielectric layers on the substrate;
a staircase structure on one side of the memory stack;
an array of dummy channel structures each extending vertically through the staircase structure; and
a plurality of dummy source structures each extending vertically through the staircase stack, wherein a subset of the dummy channel structures is surrounded by the plurality of dummy source structures,
wherein each of the dummy source structures comprises a conductive contact.
15. The 3D memory device of claim 14 , wherein at least one dummy channel structure is surrounded by at least four dummy source structures.
16. The 3D memory device of claim 14 , wherein at least two dummy channel structures are surrounded by at least six dummy source structures.
17. The 3D memory device of claim 14 , wherein at least four dummy channel structures are surrounded by at least eight dummy source structures.
18. The 3D memory device of claim 14 , wherein in a plan view, two dummy source structures and two dummy channel structures are aligned along a first row extending in a first lateral direction.
19. The 3D memory device of claim 18 , wherein the two dummy source structures are separated by the two dummy channel structure.
20. The 3D memory device of claim 18 , wherein the two dummy source structures are separated by one of the two dummy channel structure.