Pellicle and reticle including the same
Provided is a pellicle to be used in a photolithography process. The pellicle a film, at least a portion of which includes carbon allotropes. The film has a first surface and a second surface facing the first surface, the film comprises a doped region including dopants, the doped region adjacent to the first surface, the dopants include least one of boron or nitrogen, and the doped region comprises a bond between an atom of at least one of the dopants and a carbon atom.
1. A pellicle comprising:
a film, at least a portion of which includes carbon allotropes,
wherein the film has a first surface and a second surface facing the first surface,
the film comprises a doped region including dopants, the doped region adjacent to the first surface,
the dopants include at least one of boron or nitrogen, and
the doped region comprises a bond between an atom of at least one of the dopants and a carbon atom.
2. The pellicle of claim 1 , wherein the film includes
a two-dimensional carbon atomic layer, wherein at least a portion of the two-dimensional carbon layer includes one of the carbon allotropes.
3. The pellicle of claim 1 , wherein a concentration of the dopants in the doped region increases from the first surface to a middle point of the doped region and decreases from the middle point to the second surface.
4. The pellicle of claim 1 , wherein the dopants include boron.
5. The pellicle of claim 1 , wherein an atomic percent of the dopants ranges from about 1 at % to about 3 at %.
6. The pellicle of claim 1 , wherein at least some of the dopants are bonded with each other.
7. The pellicle of claim 1 , wherein the film has a thickness ranging from 5 nm to 100 nm.
8. The pellicle of claim 1 , wherein both the first surface and the second surface are exposed to air.
9. A pellicle comprising:
a film, at least a portion of which includes a carbon allotrope,
wherein the film has a first surface and a second surface facing the first surface,
the film comprises a doped region including dopants, the doped region being adjacent to the first surface,
the dopants include boron, and
a concentration of the boron in the doped region increases from the first surface to a middle point of the doped region and decreases from the middle point to the second surface.
10. The pellicle of claim 9 , wherein the carbon allotrope includes at least one of graphene, graphite, porous carbon, carbon nanowire, carbon nanotube, or diamond.
11. The pellicle of claim 9 , wherein the doped region comprises:
at least one B—C bond between a boron atom and a carbon atom; and
at least one of B—B bond between boron atoms, wherein
a ratio of the at least one B—C bond to a sum of the at least one B—B bond and the at least one B—C bond in the doped region is greater than a ratio of the at least one B—B bond to a sum of the at least one B—B bond and the at least one B—C bond.
12. The pellicle of claim 9 , wherein an atomic percent of the boron in the doped region ranges from about 1 at % to about 3 at %.
13. The pellicle of claim 9 , wherein the film has a thickness ranging from 5 nm to 100 nm.
14. The pellicle of claim 9 , wherein both the first surface and the second surface are exposed to air.
15. A reticle, comprising:
a photomask including a mask substrate and a mask pattern on the mask substrate;
a pellicle including a first surface and a second surface opposite to the first surface, the first surface being exposed to an outside and the second surface facing the photomask; and
a frame between the photomask and the pellicle, wherein
the pellicle includes a film, at least a portion of the film including a carbon allotrope,
the pellicle comprises a doped region including dopants, the doped region being adjacent to the first surface,
the dopants include at least one of boron or nitrogen, and
a concentration of the dopants in the doped region increases from the first surface to a middle point of the doped region and decreases from the middle point to the second surface.
16. The reticle of claim 15 , wherein the doped region comprises a bond between an atom of at least one of the dopants and a carbon atom.
17. The reticle of claim 15 , wherein the doped region comprises a bond between at least two atoms of the dopants.
18. The reticle of claim 15 , wherein the carbon allotrope include at least one of graphene, graphite, porous carbon, carbon nanowire, carbon nanotube, or diamond.
19. The reticle of claim 15 , wherein the pellicle is configured to be transparent to extreme ultraviolet (EUV) light.
20. The reticle of claim 15 , wherein a depth of the doped region is between 4 nm and 10 nm.