Wafer level dispenser
Provided is a wafer level dispenser, and more particularly, a wafer level dispenser having a function of applying a viscous liquid to a semiconductor chip formed on a wafer by approaching the semiconductor chip on the wafer at various angles. According to the wafer level dispenser, a viscous liquid may be dispensed to a wafer or a semiconductor chip mounted on the wafer by adjusting an angle of a pump as desired.
1. A wafer level dispenser comprising:
a pumping device dispensing a viscous liquid, wherein the pumping device comprises a nozzle;
a tilting device that is coupled to the pumping device to adjust an angle of a direction, in which the viscous liquid dispensed using the pumping device is discharged, and rotates the pumping device about a horizontal axis, wherein the tilting device comprises a surface;
a pump transporting device coupled to the tilting device and transporting the tilting device, wherein the pump transporting device comprises a surface;
a wafer supporting device placed below the pumping device and supporting a wafer, wherein the wafer supporting device comprises a ring frame; and
a wafer rotating device rotating the wafer supporting device to adjust a direction of the wafer supported by the wafer supporting device, wherein the wafer rotating device comprises an axis.
2. The wafer level dispenser of claim 1 , further comprising a wafer transporting device transporting the wafer supporting device in a horizontal direction to adjust a position of the wafer supporting device with respect to the pumping device, wherein the wafer transporting device comprises a surface.
3. The wafer level dispenser of claim 2 , wherein the wafer transporting device moves forward or backward the wafer supporting device in a horizontal direction along a straight path, and
the pump transporting device transports the pumping device in a horizontal direction and a vertical direction that are orthogonal to a transporting direction of the wafer supporting device.
4. The wafer level dispenser of claim 1 , further comprising a heating block that is in contact with a lower surface of a wafer held on the wafer supporting device and maintains a temperature of the wafer.
5. The wafer level dispenser of claim 4 , wherein the ring frame of the wafer supporting device has a ring shape and supports edges of a wafer having a disk shape, and
wherein the heating block is placed within the ring frame of the wafer supporting device.
6. The wafer level dispenser of claim 5 , further comprising a wafer pressurizing device pressurizing the wafer against the heating block to prevent warpage of the wafer held on the wafer supporting device, wherein the wafer pressurizing device comprises a surface.
7. The wafer level dispenser of claim 6 , further comprising a pump proceeding device that is mounted at the tilting device and moves the pumping device forward or backward with respect to the tilting device in a discharging direction of a viscous liquid dispensed using the pumping device, wherein the pump proceeding device comprises a surface.
8. The wafer level dispenser of claim 6 , wherein the wafer pressurizing device comprises:
a plurality of pressurizing devices arranged in a circumferential direction of the ring frame of the wafer supporting device, wherein each of the pressurizing devices comprises a surface; and
a plurality of pressurization operating devices respectively transporting the plurality of pressurizing devices in a radial direction with respect to the ring frame and respectively lifting the pressurizing devices with respect to the ring frame, wherein each of the pressurization operating devices comprises a surface.
9. The wafer level dispenser of claim 8 , wherein the wafer supporting device further comprises a plurality of wafer supporting devices configured to adsorb a lower surface of the wafer and arranged along a circumferential direction of the ring frame, wherein each of the wafer supporting devices comprises a surface.
10. The wafer level dispenser of claim 4 , wherein the pumping device comprises a piezoelectric pump dispensing a viscous liquid by using a piezoelectric actuator.
11. The wafer level dispenser of claim 10 , wherein the pumping device comprises at least one piezoelectric actuator having a length that is varied according to an applied voltage, a lever that is placed to contact the at least one piezoelectric actuator and rotates according to a variation in the length of the at least one piezoelectric actuator, a valve rod connected to the lever to move forward or backward according to rotation of the lever, a reservoir, into which the valve rod is inserted, and which moves forward or backward and stores the viscous liquid, and a nozzle connected to the reservoir, wherein the viscous liquid is discharged through the nozzle.
12. The wafer level dispenser of claim 11 , wherein the pumping device comprises two piezoelectric actuators,
wherein the two piezoelectric actuators are arranged on both sides with respect to a rotational axis of the lever, and
the tilting device rotates the pumping device about a rotational axis that is parallel to a direction in which the two piezoelectric actuators are arranged.