Substrate detecting system in a substrate storage container

1. An apparatus comprising:

a substrate storage container comprising:

a substrate detecting system disposed in the substrate storage container, wherein the substrate detecting system comprises at least an emitter and a receiver, the substrate detecting system being configured to detect a substrate condition of a substrate in the substrate storage container,

wherein the emitter comprises a light source and a shield, the light source is configured to emit a beam of light, and the shield is configured to adjust a width of the beam of light.

2. The apparatus of claim 1 , wherein the substrate storage container further comprises:

a lid;

a base board; and

a sidewall body enclosing an interior volume in the substrate storage container where the substrate detecting system is positioned.

3. The apparatus of claim 2 , wherein the substrate storage container further comprises:

a battery embedded in the base board.

4. The apparatus of claim 2 , wherein the substrate storage container further comprises:

a plurality of slots formed in the sidewall body configured to receive a substrate in each slot.

5. The apparatus of claim 1 , wherein the substrate storage container further comprises:

a signal controller coupled to the emitter.

6. The apparatus of claim 1 , wherein the substrate storage container further comprises:

a motor coupled to the emitter.

7. The apparatus of claim 1 , wherein the receiver in the substrate storage container is configured to receive a beam of light emitted from the emitter.

8. The apparatus of claim 1 , wherein the substrate detecting system is configured to monitor a substrate surface condition, a substrate profile, a substrate topography, a substrate warpage, and a substrate flatness of the substrate in the substrate storage container.

9. The apparatus of claim 1 , wherein the emitter of the substrate detecting system is disposed on one lateral side of the substrate storage container, and the receiver is disposed at an opposite lateral side of the substrate storage container.

10. The apparatus of claim 1 , wherein the emitter of the substrate detecting system is disposed on one vertical side of the substrate storage container, and the receiver is disposed at an opposite vertical side of the substrate storage container.

11. An apparatus comprising:

a substrate storage container comprising:

a base board, wherein the base board has a plurality of positioning holes configured to mate with a plurality of positioning pins disposed on a load port; and

a substrate detecting system disposed on the base board, wherein the substrate detecting system comprises at least an emitter and a receiver, the substrate detecting system being configured to detect a substrate condition of a substrate in the substrate storage container, and the emitter and the receiver are positioned on the base board.

12. The apparatus of claim 11 , further comprising a contact pad disposed on the base board and electrically connected to the load port.

13. The apparatus of claim 12 , wherein a data is transmitted via the contact pad wirelessly.

14. The apparatus of claim 11 , further comprising a sensor controller coupled to the emitter.

15. The apparatus of claim 14 , further comprising an image sensor coupled to the sensor controller.

16. An apparatus comprising:

a substrate storage container comprising:

a substrate detecting system disposed in the substrate storage container, wherein the substrate detecting system comprises at least an emitter and a receiver, the substrate detecting system is configured to detect a substrate condition of a substrate in the substrate storage container, and the emitter is rotatable relative to the receiver; and

a sensor controller coupled to the emitter.

17. The apparatus of claim 16 , wherein the sensor controller is coupled to the receiver.

18. The apparatus of claim 16 , further comprising an image sensor coupled to the sensor controller.

19. The apparatus of claim 16 , wherein the substrate storage container further comprising a base board having a plurality of positioning holes configured to mate with a plurality of positioning pins disposed on a load port.

20. The apparatus of claim 16 , further comprising a contact pad disposed on the base board and electrically connected to the load port.